Seongchul Hong

Person

Suwon-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Semiconductor manufacturing apparatus and operating method thereof
- Patent number 11,979,973
- Issue date May 7, 2024
- Samsung Electronics Co., Ltd.
- Dohyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light source and extreme ultraviolet light source system using the...
- Patent number 11,828,952
- Issue date Nov 28, 2023
- Samsung Electronics Co., Ltd.
- Dohyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser beam delivery apparatus for extreme ultra violet light source
- Patent number 11,778,719
- Issue date Oct 3, 2023
- Samsung Electronics Co., Ltd.
- Dohyung Kim
- G02 - OPTICS
Information Patent Grant
Extreme ultraviolet (EUV) exposure apparatus and method of manufact...
- Patent number 10,754,254
- Issue date Aug 25, 2020
- Samsung Electronics Co., Ltd.
- Keunhee Bai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND OPERATING METHOD THEREOF
- Publication number 20240251496
- Publication date Jul 25, 2024
- Samsung Electronics Co., Ltd.
- Dohyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET EXPOSURE APPARATUS INCLUDING A MASK STAGE
- Publication number 20240219848
- Publication date Jul 4, 2024
- Samsung Electronics Co., Ltd.
- Sanghwan LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CORRECTING EUV OVERLAY AND METHOD OF MANUFACTURING SEMICO...
- Publication number 20240176230
- Publication date May 30, 2024
- Samsung Electronics Co., Ltd.
- Hachul Shin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT SOURCE AND EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM USING THE...
- Publication number 20220066225
- Publication date Mar 3, 2022
- Samsung Electronics Co., Ltd.
- Dohyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND OPERATING METHOD THEREOF
- Publication number 20210385932
- Publication date Dec 9, 2021
- Samsung Electronics Co., Ltd.
- Dohyung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER BEAM DELIVERY APPARATUS FOR EXTREME ULTRA VIOLET LIGHT SOURCE
- Publication number 20210219408
- Publication date Jul 15, 2021
- Samsung Electronics Co., Ltd.
- Dohyung KIM
- H01 - BASIC ELECTRIC ELEMENTS

Seongchul Hong

Person

Patents Grantslast 30 patents

Semiconductor manufacturing apparatus and operating method thereof

Light source and extreme ultraviolet light source system using the...

Laser beam delivery apparatus for extreme ultra violet light source

Extreme ultraviolet (EUV) exposure apparatus and method of manufact...

Patents Applicationslast 30 patents

SEMICONDUCTOR MANUFACTURING APPARATUS AND OPERATING METHOD THEREOF

EXTREME ULTRAVIOLET EXPOSURE APPARATUS INCLUDING A MASK STAGE

METHOD OF CORRECTING EUV OVERLAY AND METHOD OF MANUFACTURING SEMICO...

LIGHT SOURCE AND EXTREME ULTRAVIOLET LIGHT SOURCE SYSTEM USING THE...

SEMICONDUCTOR MANUFACTURING APPARATUS AND OPERATING METHOD THEREOF

LASER BEAM DELIVERY APPARATUS FOR EXTREME ULTRA VIOLET LIGHT SOURCE