Seongjun Heo

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Removing metal contamination from surfaces of a processing chamber
- Patent number 12,191,125
- Issue date Jan 7, 2025
- Lam Research Corporation
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide mandrels in patterning
- Patent number 12,183,589
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alternating etch and passivation process
- Patent number 11,848,212
- Issue date Dec 19, 2023
- Lam Research Corporation
- Seongjun Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Removing metal contamination from surfaces of a processing chamber
- Patent number 11,842,888
- Issue date Dec 12, 2023
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alternating etch and passivation process
- Patent number 11,551,938
- Issue date Jan 10, 2023
- Lam Research Corporation
- Seongjun Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide mandrels in patterning
- Patent number 11,355,353
- Issue date Jun 7, 2022
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for achieving smooth side walls after Bosch etch process
- Patent number 8,871,105
- Issue date Oct 28, 2014
- Lam Research Corporation
- Jaroslaw W. Winniczek
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TIN OXIDE MANDRELS IN PATTERNING
- Publication number 20250087498
- Publication date Mar 13, 2025
- LAM RESEARCH CORPORATION
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOVING METAL CONTAMINATION FROM SURFACES OF A PROCESSING CHAMBER
- Publication number 20240112896
- Publication date Apr 4, 2024
- LAM RESEARCH CORPORATION
- Jengyi YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATING ETCH AND PASSIVATION PROCESS
- Publication number 20240087904
- Publication date Mar 14, 2024
- LAM RESEARCH CORPORATION
- Seongjun Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATING ETCH AND PASSIVATION PROCESS
- Publication number 20230197459
- Publication date Jun 22, 2023
- LAM RESEARCH CORPORATION
- Seongjun Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOVING METAL CONTAMINATION FROM SURFACES OF A PROCESSING CHAMBER
- Publication number 20230148265
- Publication date May 11, 2023
- LAM RESEARCH CORPORATION
- Jengyi YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ALTERNATING ETCH AND PASSIVATION PROCESS
- Publication number 20220208551
- Publication date Jun 30, 2022
- LAM RESEARCH CORPORATION
- Seongjun Heo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOVING METAL CONTAMINATION FROM SURFACES OF A PROCESSING CHAMBER
- Publication number 20220037132
- Publication date Feb 3, 2022
- LAM RESEARCH CORPORATION
- Jengyi YU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TIN OXIDE MANDRELS IN PATTERNING
- Publication number 20210265173
- Publication date Aug 26, 2021
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIN OXIDE MANDRELS IN PATTERNING
- Publication number 20190237341
- Publication date Aug 1, 2019
- LAM RESEARCH CORPORATION
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR ACHIEVING SMOOTH SIDE WALLS AFTER BOSCH ETCH PROCESS
- Publication number 20130237062
- Publication date Sep 12, 2013
- Jaroslaw W. Winniczek
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Seongjun Heo

Person

Patents Grantslast 30 patents

Removing metal contamination from surfaces of a processing chamber

Tin oxide mandrels in patterning

Alternating etch and passivation process

Removing metal contamination from surfaces of a processing chamber

Alternating etch and passivation process

Tin oxide mandrels in patterning

Method for achieving smooth side walls after Bosch etch process

Patents Applicationslast 30 patents

TIN OXIDE MANDRELS IN PATTERNING

REMOVING METAL CONTAMINATION FROM SURFACES OF A PROCESSING CHAMBER

ALTERNATING ETCH AND PASSIVATION PROCESS

ALTERNATING ETCH AND PASSIVATION PROCESS

REMOVING METAL CONTAMINATION FROM SURFACES OF A PROCESSING CHAMBER

ALTERNATING ETCH AND PASSIVATION PROCESS

REMOVING METAL CONTAMINATION FROM SURFACES OF A PROCESSING CHAMBER

TIN OXIDE MANDRELS IN PATTERNING

TIN OXIDE MANDRELS IN PATTERNING

METHOD FOR ACHIEVING SMOOTH SIDE WALLS AFTER BOSCH ETCH PROCESS