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Seonkyung Lee
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San Ramon, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and apparatus for determining process rate
Patent number
11,056,322
Issue date
Jul 6, 2021
Lam Research Corporation
Yassine Kabouzi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System, method and apparatus for using optical data to monitor RF g...
Patent number
10,325,760
Issue date
Jun 18, 2019
Lam Research Corporation
John C. Valcore
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus with a spectral reflectometer for processing substrates
Patent number
9,752,981
Issue date
Sep 5, 2017
Lam Research Corporation
Seonkyung Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for determining process rate
Patent number
9,735,069
Issue date
Aug 15, 2017
Lam Research Corporation
Yassine Kabouzi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System, method and apparatus for using optical data to monitor RF g...
Patent number
9,627,186
Issue date
Apr 18, 2017
Lam Research Corporation
John C. Valcore
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD AND APPARATUS FOR DETERMINING PROCESS RATE
Publication number
20170338160
Publication date
Nov 23, 2017
LAM RESEARCH CORPORATION
Yassine Kabouzi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM, METHOD AND APPARATUS FOR USING OPTICAL DATA TO MONITOR RF G...
Publication number
20170200592
Publication date
Jul 13, 2017
LAM RESEARCH CORPORATION
John C. Valcore
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR DETERMINING PROCESS RATE
Publication number
20170084503
Publication date
Mar 23, 2017
LAM RESEARCH CORPORATION
Yassine Kabouzi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS WITH A SPECTRAL REFLECTOMETER FOR PROCESSING SUBSTRATES
Publication number
20160320293
Publication date
Nov 3, 2016
LAM RESEARCH CORPORATION
Seonkyung LEE
G01 - MEASURING TESTING
Information
Patent Application
System, Method and Apparatus for Using Optical Data to Monitor RF G...
Publication number
20160064199
Publication date
Mar 3, 2016
LAM RESEARCH CORPORATION
John C. Valcore
G01 - MEASURING TESTING