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Serdar MANAKLI
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MEYRIE, FR
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Patents Grants
last 30 patents
Information
Patent Grant
Method of reducing shot count in direct writing by a particle or ph...
Patent number
10,197,909
Issue date
Feb 5, 2019
Luc Martin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Free form fracturing method for electronic or optical lithography u...
Patent number
9,891,519
Issue date
Feb 13, 2018
Aselta Nanographics
Serdar Manakli
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of electron-beam lithography with correction of corner round...
Patent number
9,607,808
Issue date
Mar 28, 2017
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Serdar Manakli
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Lithography method with combined optimization of radiated energy an...
Patent number
9,250,540
Issue date
Feb 2, 2016
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Serdar Manakli
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Large-mesh cell-projection electron-beam lithography method
Patent number
9,235,132
Issue date
Jan 12, 2016
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Serdar Manakli
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Electron-beam lithography method with correction of line ends by in...
Patent number
8,713,499
Issue date
Apr 29, 2014
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Serdar Manakli
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF REDUCING SHOT COUNT IN DIRECT WRITING BY A PARTICLE OR PH...
Publication number
20170097571
Publication date
Apr 6, 2017
ASELTA NANOGRAPHICS
Luc MARTIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FREE FORM FRACTURING METHOD FOR ELECTRONIC OR OPTICAL LITHOGRAPHY U...
Publication number
20160252807
Publication date
Sep 1, 2016
ASELTA NANOGRAPHICS
Serdar MANAKLI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LITHOGRAPHY METHOD WITH COMBINED OPTIMIZATION OF RADIATED ENERGY AN...
Publication number
20130201468
Publication date
Aug 8, 2013
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Serdar Manakli
B82 - NANO-TECHNOLOGY
Information
Patent Application
LARGE-MESH CELL-PROJECTION ELECTRON-BEAM LITHOGRAPHY METHOD
Publication number
20130201467
Publication date
Aug 8, 2013
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Serdar Manakli
B82 - NANO-TECHNOLOGY
Information
Patent Application
"ELECTRON-BEAM LITHOGRAPHY METHOD WITH CORRECTION OF LINE ENDS BY I...
Publication number
20130198707
Publication date
Aug 1, 2013
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Serdar Manakli
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method of Electron-Beam Lithography with Correction of Corner Round...
Publication number
20130181379
Publication date
Jul 18, 2013
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Serdar Manakli
B82 - NANO-TECHNOLOGY