Serge F. C. L. Wetzels

Follow

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Positioning system for use in lithographic apparatus
- Patent number 6,852,989
- Issue date Feb 8, 2005
- ASML Netherlands B.V.
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning system for use in lithographic apparatus
- Patent number 6,635,887
- Issue date Oct 21, 2003
- ASML Netherlands B.V.
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Positioning system for use in lithographic apparatus
- Publication number 20010050341
- Publication date Dec 13, 2001
- Yim Bun P. Kwan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY