Serge Kosche

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San Francisco, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system including dual ion filter for downstrea...
- Patent number 11,967,486
- Issue date Apr 23, 2024
- Lam Research Corporation
- Andrew Stratton Bravo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution device with actively cooled grid
- Patent number 9,679,749
- Issue date Jun 13, 2017
- Lam Research Corporation
- Ivelin Angelov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...
- Publication number 20240266147
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Andrew Stratton BRAVO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTIMIZING EDGE RADICAL FLUX IN A DOWNSTREAM PLASMA CHAMBER
- Publication number 20230298859
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Andrew Stratton BRAVO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM INCLUDING DUAL ION FILTER FOR DOWNSTREA...
- Publication number 20220076924
- Publication date Mar 10, 2022
- LAM RESEARCH CORPORATION
- Andrew Stratton BRAVO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PLASMA-LESS DE-HALOGENATION
- Publication number 20190051540
- Publication date Feb 14, 2019
- LAM RESEARCH CORPORATION
- Ji Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION DEVICE WITH ACTIVELY COOLED GRID
- Publication number 20160093472
- Publication date Mar 31, 2016
- LAM RESEARCH CORPORATION
- Ivelin Angelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Partial Contact Wafer Retaining Ring Apparatus
- Publication number 20100120335
- Publication date May 13, 2010
- Novellus Systems, Inc.
- Haoquan Fang
- B24 - GRINDING POLISHING