Sergei F. Lyuksyutov

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Akron, OH, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of Z-lift electrostatic nanolithography
- Patent number 7,538,332
- Issue date May 26, 2009
- The United States of America as represented by the Secretary of the Air Force
- Shane Juhl
- G01 - MEASURING TESTING
Information Patent Grant
Method of polymer nanolithography
- Patent number 7,431,970
- Issue date Oct 7, 2008
- United States of America as represented by the Secretary of the Air Force
- Sergei Lyuksyutov
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of amplitude modulated electrostatic polymer nanolithography
- Patent number 7,241,992
- Issue date Jul 10, 2007
- United States of America as represented by the Secretary of the Air Force
- Sergei F. Lyuksyutov
- G01 - MEASURING TESTING