Sergei Shulepov

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Eindhoven, NA

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Patents Grantslast 30 patents

Information Patent Grant
Fluid handling structure, a lithographic apparatus and a device man...
- Patent number 8,711,326
- Issue date Apr 29, 2014
- ASML Netherlands B.V.
- Ronald Van Der Ham
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY