Sergei Sokolov

Person

Utrecht, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Alignment method
- Patent number 11,762,305
- Issue date Sep 19, 2023
- ASML Netherlands B.V.
- Sergei Sokolov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Variable diffraction grating
- Patent number 11,703,771
- Issue date Jul 18, 2023
- ASML Holding N.V.
- Ali Alsaqqa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology sensor, illumination system and method of generating meas...
- Patent number 11,474,435
- Issue date Oct 18, 2022
- ASML Netherlands B.V.
- Sebastianus Adrianus Goorden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining a value of a parameter of interest of a patte...
- Patent number 11,181,828
- Issue date Nov 23, 2021
- ASML Netherlands B.V.
- Patrick Warnaar
- G01 - MEASURING TESTING
Information Patent Grant
Method of measuring a parameter of a patterning process, metrology...
- Patent number 11,150,563
- Issue date Oct 19, 2021
- ASML Netherlands B.V.
- Sergei Sokolov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of measuring a focus parameter relating to a structure forme...
- Patent number 11,022,899
- Issue date Jun 1, 2021
- ASML Netherlands B.V.
- Fahong Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for of measuring a parameter relating to a structure formed...
- Patent number 10,831,107
- Issue date Nov 10, 2020
- ASML Netherlands B.V.
- Sergei Sokolov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology method and apparatus, computer program and lithographic s...
- Patent number 10,788,757
- Issue date Sep 29, 2020
- ASML Netherlands B.V.
- Su-Ting Cheng
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD
- Publication number 20240160151
- Publication date May 16, 2024
- ASML NETHERLANDS B.V.
- Willem Marie Julia Marcel COENE
- G02 - OPTICS
Information Patent Application
METROLOGY SYSTEM AND COHERENCE ADJUSTERS
- Publication number 20240027913
- Publication date Jan 25, 2024
- ASML NETHERLANDS B.V.
- Sergei SOKOLOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VARIABLE DIFFRACTION GRATING
- Publication number 20220390861
- Publication date Dec 8, 2022
- ASML Holding N.V.
- Ali ALSAQQA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT METHOD
- Publication number 20220382175
- Publication date Dec 1, 2022
- ASML NETHERLANDS B.V.
- Sergei SOKOLOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY SENSOR, ILLUMINATION SYSTEM AND METHOD OF GENERATING MEAS...
- Publication number 20220057718
- Publication date Feb 24, 2022
- ASML NETHERLANDS B.V.
- Sebastianus Adrianus GOORDEN
- G02 - OPTICS
Information Patent Application
METHOD OF MEASURING A PARAMETER OF A PATTERNING PROCESS, METROLOGY...
- Publication number 20200192230
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Sergei SOKOLOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for of Measuring a Focus Parameter Relating to a Structure F...
- Publication number 20200166335
- Publication date May 28, 2020
- ASML NETHERLANDS B.V.
- Fahong LI
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF DETERMINING A VALUE OF A PARAMETER OF INTEREST OF A PATTE...
- Publication number 20200133140
- Publication date Apr 30, 2020
- ASML NETHERLANDS B.V.
- Patrick WARNAAR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for of Measuring a Parameter Relating to a Structure Formed...
- Publication number 20200089125
- Publication date Mar 19, 2020
- ASML NETHERLANDS B.V.
- Sergei SOKOLOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Method and Apparatus, Computer Program and Lithographic S...
- Publication number 20190317413
- Publication date Oct 17, 2019
- ASML NETHERLANDS B.V.
- Su-Ting CHENG
- G01 - MEASURING TESTING

Sergei Sokolov

Person

Patents Grantslast 30 patents

Alignment method

Variable diffraction grating

Metrology sensor, illumination system and method of generating meas...

Method of determining a value of a parameter of interest of a patte...

Method of measuring a parameter of a patterning process, metrology...

Method of measuring a focus parameter relating to a structure forme...

Method for of measuring a parameter relating to a structure formed...

Metrology method and apparatus, computer program and lithographic s...

Patents Applicationslast 30 patents

DIGITAL HOLOGRAPHIC MICROSCOPE AND ASSOCIATED METROLOGY METHOD

METROLOGY SYSTEM AND COHERENCE ADJUSTERS

VARIABLE DIFFRACTION GRATING

ALIGNMENT METHOD

METROLOGY SENSOR, ILLUMINATION SYSTEM AND METHOD OF GENERATING MEAS...

METHOD OF MEASURING A PARAMETER OF A PATTERNING PROCESS, METROLOGY...

Method for of Measuring a Focus Parameter Relating to a Structure F...

METHOD OF DETERMINING A VALUE OF A PARAMETER OF INTEREST OF A PATTE...

Method for of Measuring a Parameter Relating to a Structure Formed...

Metrology Method and Apparatus, Computer Program and Lithographic S...