Sergey Babin

Person

Castro Valley, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for high-resolution processing of thin layers using electron...
- Patent number 7,786,403
- Issue date Aug 31, 2010
- Nawo Tec GmbH
- Hans Koops
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Real-time prediction of and correction of proximity resist heating...
- Patent number 6,720,565
- Issue date Apr 13, 2004
- Applied Materials, Inc.
- Robert Innes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for forming a charged particle beam of arbitra...
- Patent number 6,455,863
- Issue date Sep 24, 2002
- Applied Materials, Inc.
- Sergey Babin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for real-time correction of resist heating in...
- Patent number 6,420,717
- Issue date Jul 16, 2002
- Applied Materials, Inc.
- Sergey Babin
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Real-time prediction of proximity resist heating and correction of...
- Patent number 6,373,071
- Issue date Apr 16, 2002
- Applied Materials, Inc.
- Robert Innes
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Minimization of electron fogging in electron beam lithography
- Patent number 6,326,635
- Issue date Dec 4, 2001
- Etec Systems, Inc.
- Robert Innes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for run-time correction of proximity effects i...
- Patent number 5,847,959
- Issue date Dec 8, 1998
- Etec Systems, Inc.
- Lee H. Veneklasen
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for smoothening rough edges of lithographic pa...
- Publication number 20090108486
- Publication date Apr 30, 2009
- Sergey Babin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH-RESOLUTION AUTOSTEREOSCOPIC DISPLAY AND METHOD FOR DISPLAYING...
- Publication number 20060238545
- Publication date Oct 26, 2006
- Dmitry V. Bakin
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
Method for high-resolution processing of thin layers using electron...
- Publication number 20050087514
- Publication date Apr 28, 2005
- Hans Koops
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plana holographic multiplexer/demultiplexer utilizing photonic band...
- Publication number 20030210862
- Publication date Nov 13, 2003
- Vladimir Yankov
- G02 - OPTICS
Information Patent Application
Integrating element for optical fiber communication systems based o...
- Publication number 20030206681
- Publication date Nov 6, 2003
- Vyoptics, Inc.
- Leonid Polonskiy
- G02 - OPTICS
Information Patent Application
Photonic multi-bandgap lightwave device and methods for manufacturi...
- Publication number 20030206694
- Publication date Nov 6, 2003
- Vyoptics, Inc.
- Sergey Babin
- G02 - OPTICS
Information Patent Application
Real-time prediction of and correction of proximity resist heating...
- Publication number 20020148978
- Publication date Oct 17, 2002
- APPLIED MATERIALS, INC.
- Robert Innes
- B82 - NANO-TECHNOLOGY

Sergey Babin

Person

Patents Grantslast 30 patents

Method for high-resolution processing of thin layers using electron...

Real-time prediction of and correction of proximity resist heating...

Apparatus and method for forming a charged particle beam of arbitra...

Method and apparatus for real-time correction of resist heating in...

Real-time prediction of proximity resist heating and correction of...

Minimization of electron fogging in electron beam lithography

Method and apparatus for run-time correction of proximity effects i...

Patents Applicationslast 30 patents

Method and apparatus for smoothening rough edges of lithographic pa...

HIGH-RESOLUTION AUTOSTEREOSCOPIC DISPLAY AND METHOD FOR DISPLAYING...

Method for high-resolution processing of thin layers using electron...

Plana holographic multiplexer/demultiplexer utilizing photonic band...

Integrating element for optical fiber communication systems based o...

Photonic multi-bandgap lightwave device and methods for manufacturi...

Real-time prediction of and correction of proximity resist heating...