Sergey Churilov

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Troitsk, RU

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Patents Applicationslast 30 patents

Information Patent Application
TARGET MATERIAL, A SOURCE, AN EUV LITHOGRAPHIC APPARATUS AND A DEVI...
- Publication number 20110043777
- Publication date Feb 24, 2011
- ASML NETHERLANDS B.V.
- Vladimir Mihailovitc Krivtsun
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR