Membership
Tour
Register
Log in
Sergey G. Belostotskiy
Follow
Person
Sunnyvale, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Process chamber for etching low k and other dielectric films
Patent number
11,410,860
Issue date
Aug 9, 2022
Applied Materials, Inc.
Dmitry Lubomirsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of patterning a low-k dielectric film
Patent number
11,302,519
Issue date
Apr 12, 2022
Applied Materials, Inc.
Srinivas D. Nemani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process chamber for etching low K and other dielectric films
Patent number
10,923,367
Issue date
Feb 16, 2021
Applied Materials, Inc.
Dmitry Lubomirsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process chamber for etching low K and other dielectric films
Patent number
10,096,496
Issue date
Oct 9, 2018
Applied Materials, Inc.
Dmitry Lubomirsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process chamber for etching low k and other dielectric films
Patent number
9,666,414
Issue date
May 30, 2017
Applied Materials, Inc.
Dmitry Lubomirsky
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Non-intrusive measurement of a wafer DC self-bias in semiconductor...
Patent number
9,601,301
Issue date
Mar 21, 2017
Applied Materials, Inc.
Sergey G. Belostotskiy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature ramping using gas distribution plate heat
Patent number
9,368,370
Issue date
Jun 14, 2016
Applied Materials, Inc.
Sergey G. Belostotskiy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of patterning a low-k dielectric film
Patent number
9,165,783
Issue date
Oct 20, 2015
Applied Materials, Inc.
Srinivas D. Nemani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of patterning a silicon nitride dielectric film
Patent number
9,093,389
Issue date
Jul 28, 2015
Applied Materials, Inc.
Srinivas D. Nemani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for etching plural layers on a workpiece includin...
Patent number
8,932,959
Issue date
Jan 13, 2015
Applied Materials, Inc.
Srinivas D. Nemani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of patterning a low-k dielectric film
Patent number
8,802,572
Issue date
Aug 12, 2014
Applied Materials, Inc.
Srinivas D. Nemani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon oxide recess etch
Patent number
8,748,322
Issue date
Jun 10, 2014
Applied Materials, Inc.
Nancy Fung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature enhanced electrostatic chucking in plasma processing ap...
Patent number
8,580,693
Issue date
Nov 12, 2013
Applied Materials, Inc.
Sergey G. Belostotskiy
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PROCESS CHAMBER FOR ETCHING LOW K AND OTHER DIELECTRIC FILMS
Publication number
20210134618
Publication date
May 6, 2021
Applied Materials, Inc.
Dmitry LUBOMIRSKY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CHAMBER FOR ETCHING LOW K AND OTHER DIELECTRIC FILMS
Publication number
20180358244
Publication date
Dec 13, 2018
Applied Materials, Inc.
Dmitry LUBOMIRSKY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS CHAMBER FOR ETCHING LOW K AND OTHER DIELECTRIC FILMS
Publication number
20170229325
Publication date
Aug 10, 2017
Applied Materials, Inc.
Dmitry LUBOMIRSKY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PATTERNING A LOW-K DIELECTRIC FILM
Publication number
20150380215
Publication date
Dec 31, 2015
Srinivas D. Nemani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE RAMPING USING GAS DISTRIBUTION PLATE HEAT
Publication number
20150262834
Publication date
Sep 17, 2015
Applied Materials, Inc.
Sergey G. BELOSTOTSKIY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOW TEMPERATURE PLASMA ANNEAL PROCESS FOR SUBLIMATIVE ETCH PROCESSES
Publication number
20150064921
Publication date
Mar 5, 2015
Applied Materials, Inc.
Srinivas D. NEMANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIZONE HOLLOW CATHODE DISCHARGE SYSTEM WITH COAXIAL AND AZIMUTHA...
Publication number
20150040829
Publication date
Feb 12, 2015
Applied Materials, Inc.
Kartik RAMASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NON-INTRUSIVE MEASUREMENT OF A WAFER DC SELF-BIAS IN SEMICONDUCTOR...
Publication number
20140375299
Publication date
Dec 25, 2014
Sergey G. Belostotskiy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NEAR SURFACE ETCH SELECTIVITY ENHANCEMENT
Publication number
20140342569
Publication date
Nov 20, 2014
Applied Materials, Inc.
Lina Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRESSURE CONTROLLER CONFIGURATION FOR SEMICONDUCTOR PROCESSING APPL...
Publication number
20140311581
Publication date
Oct 23, 2014
Applied Materials, Inc.
Sergey G. Belostotskiy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-MODE ETCH CHAMBER SOURCE ASSEMBLY
Publication number
20140262031
Publication date
Sep 18, 2014
Sergey G. BELOSTOTSKIY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PATTERNING A SILICON NITRIDE DIELECTRIC FILM
Publication number
20140199851
Publication date
Jul 17, 2014
Applied Materials, Inc.
Srinivas D. Nemani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEM FOR ETCHING PLURAL LAYERS ON A WORKPIECE INCLUDIN...
Publication number
20140170856
Publication date
Jun 19, 2014
Srinivas D. Nemani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PATTERNING A LOW-K DIELECTRIC FILM
Publication number
20140120726
Publication date
May 1, 2014
Srinivas D. Nemani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PATTERNING A LOW-K DIELECTRIC FILM
Publication number
20140017898
Publication date
Jan 16, 2014
Srinivas D. Nemani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS CHAMBER FOR ETCHING LOW K AND OTHER DIELECTRIC FILMS
Publication number
20130105303
Publication date
May 2, 2013
Dmitry LUBOMIRSKY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE ENHANCED ELECTROSTATIC CHUCKING IN PLASMA PROCESSING AP...
Publication number
20120052690
Publication date
Mar 1, 2012
Applied Materials, Inc.
Sergey G. BELOSTOTSKIY
H01 - BASIC ELECTRIC ELEMENTS