Sergey Tarabrin

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Metrology method and associated computer product
- Patent number 12,105,432
- Issue date Oct 1, 2024
- ASML Netherlands B.V.
- Narjes Javaheri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus to determine a patterning process parameter
- Patent number 11,409,204
- Issue date Aug 9, 2022
- ASML Netherlands B.V.
- Sergey Tarabrin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of measuring a parameter of a patterning process, metrology...
- Patent number 11,150,563
- Issue date Oct 19, 2021
- ASML Netherlands B.V.
- Sergei Sokolov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement apparatus and method of measuring a target
- Patent number 11,042,100
- Issue date Jun 22, 2021
- ASML Netherlands B.V.
- Jin Lian
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining a value of a parameter of interest, method of...
- Patent number 10,795,269
- Issue date Oct 6, 2020
- ASML Netherlands B.V.
- Zili Zhou
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus to determine a patterning process parameter
- Patent number 10,691,031
- Issue date Jun 23, 2020
- ASML Netherlands B.V.
- Sergey Tarabrin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology apparatus, method of measuring a structure, device manufa...
- Patent number 10,599,048
- Issue date Mar 24, 2020
- ASML Netherlands B.V.
- Sergey Tarabrin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology method, apparatus and computer program
- Patent number 10,598,483
- Issue date Mar 24, 2020
- ASML Netherlands B.V.
- Sergey Tarabrin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining a value of a parameter of interest of a targe...
- Patent number 10,585,048
- Issue date Mar 10, 2020
- ASML Netherlands B.V.
- Samee Ur Rehman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METROLOGY METHOD AND DEVICE
- Publication number 20240361705
- Publication date Oct 31, 2024
- ASML NETHERLANDS B.V.
- Sergey TARABRIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY METHOD AND ASSOCIATED COMPUTER PRODUCT
- Publication number 20220252990
- Publication date Aug 11, 2022
- ASML Netherlands B,V.
- Narjes JAVAHERI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR METROLOGY OPTIMIZATION
- Publication number 20220082944
- Publication date Mar 17, 2022
- ASML NETHERLANDS B.V.
- Samee Ur REHMAN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS TO DETERMINE A PATTERNING PROCESS PARAMETER
- Publication number 20200285157
- Publication date Sep 10, 2020
- ASML NETHERLANDS B.V.
- Sergey TARABRIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MEASURING A PARAMETER OF A PATTERNING PROCESS, METROLOGY...
- Publication number 20200192230
- Publication date Jun 18, 2020
- ASML NETHERLANDS B.V.
- Sergei SOKOLOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Measurement Apparatus and Method of Measuring a Target
- Publication number 20190369505
- Publication date Dec 5, 2019
- ASML NETHERLANDS B.V.
- Jin LIAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF DETERMINING A VALUE OF A PARAMETER OF INTEREST OF A TARGE...
- Publication number 20190323972
- Publication date Oct 24, 2019
- ASML NETHERLANDS B.V.
- Samee Ur REHMAN
- G01 - MEASURING TESTING
Information Patent Application
Method Of Determining A Value Of A Parameter Of Interest, Method Of...
- Publication number 20190129316
- Publication date May 2, 2019
- ASML NETHERLANDS B.V.
- Zili ZHOU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Apparatus, Method of Measuring a Structure, Device Manufa...
- Publication number 20190129315
- Publication date May 2, 2019
- ASML NETHERLANDS B.V.
- Sergey Tarabrin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS TO DETERMINE A PATTERNING PROCESS PARAMETER
- Publication number 20190072862
- Publication date Mar 7, 2019
- ASML NETHERLANDS B.V.
- Sergey TARABRIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Method, Apparatus and Computer Program
- Publication number 20180073866
- Publication date Mar 15, 2018
- ASML NETHERLANDS B.V.
- Sergey Tarabrin
- G01 - MEASURING TESTING

Sergey Tarabrin

Person

Patents Grantslast 30 patents

Metrology method and associated computer product

Method and apparatus to determine a patterning process parameter

Method of measuring a parameter of a patterning process, metrology...

Measurement apparatus and method of measuring a target

Method of determining a value of a parameter of interest, method of...

Method and apparatus to determine a patterning process parameter

Metrology apparatus, method of measuring a structure, device manufa...

Metrology method, apparatus and computer program

Method of determining a value of a parameter of interest of a targe...

Patents Applicationslast 30 patents

METROLOGY METHOD AND DEVICE

METROLOGY METHOD AND ASSOCIATED COMPUTER PRODUCT

METHOD FOR METROLOGY OPTIMIZATION

METHOD AND APPARATUS TO DETERMINE A PATTERNING PROCESS PARAMETER

METHOD OF MEASURING A PARAMETER OF A PATTERNING PROCESS, METROLOGY...

Measurement Apparatus and Method of Measuring a Target

METHOD OF DETERMINING A VALUE OF A PARAMETER OF INTEREST OF A TARGE...

Method Of Determining A Value Of A Parameter Of Interest, Method Of...

Metrology Apparatus, Method of Measuring a Structure, Device Manufa...

METHOD AND APPARATUS TO DETERMINE A PATTERNING PROCESS PARAMETER

Metrology Method, Apparatus and Computer Program