Sergey V Oshemkov

Person

Karmiel, IL

People

Patents Grantslast 30 patents

Information Patent Grant
Method for removing a particle from a mask system
- Patent number 11,774,870
- Issue date Oct 3, 2023
- Carl Zeiss SMT GmbH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Critical dimension variation correction in extreme ultraviolet lith...
- Patent number 10,670,955
- Issue date Jun 2, 2020
- Carl Zeiss SMT GmbH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Critical dimension variation correction in extreme ultraviolet lith...
- Patent number 10,095,101
- Issue date Oct 9, 2018
- Carl Zeiss SMT GmbH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Surface defect repair by irradiation
- Patent number 9,690,191
- Issue date Jun 27, 2017
- Carl Zeiss SMS Ltd
- Sergey Oshemkov
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Controllable transmission and phase compensation of transparent mat...
- Patent number 9,034,539
- Issue date May 19, 2015
- Carl Zeiss SMS GmbH
- Sergey Oshemkov
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method and apparatus for modifying a substrate surface of a photoli...
- Patent number 8,735,030
- Issue date May 27, 2014
- Carl Zeiss SMT GmbH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for inducing controllable jets in liquids
- Patent number 8,101,921
- Issue date Jan 24, 2012
- Carl Zeiss SMS Ltd
- Sergey Oshemkov
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Method for correcting critical dimension variations in photomasks
- Patent number 7,736,819
- Issue date Jun 15, 2010
- Pixer Technology Ltd.
- Eitan Zait
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for repairing defected photomasks
- Patent number 7,459,242
- Issue date Dec 2, 2008
- Pixer Technology Ltd.
- Eitan Zait
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REMOVING A PARTICLE FROM A MASK SYSTEM
- Publication number 20230053667
- Publication date Feb 23, 2023
- Carl Zeiss SMT GMBH
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CRITICAL DIMENSION VARIATION CORRECTION IN EXTREME ULTRAVIOLET LITH...
- Publication number 20190004417
- Publication date Jan 3, 2019
- Carl Zeiss SMT GMBH
- Sergey OSHEMKOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CRITICAL DIMENSION VARIATION CORRECTION IN EXTREME ULTRAVIOLET LITH...
- Publication number 20160370697
- Publication date Dec 22, 2016
- Carl Zeiss SMT GMBH
- Sergey OSHEMKOV
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SURFACE DEFECT REPAIR BY IRRADIATION
- Publication number 20160004151
- Publication date Jan 7, 2016
- CARL ZEISS SMS LTD.
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROLLABLE TRANSMISSION AND PHASE COMPENSATION OF TRANSPARENT MAT...
- Publication number 20130209926
- Publication date Aug 15, 2013
- Sergey Oshemkov
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
METHOD AND APPARATUS FOR MODIFYING A SUBSTRATE SURFACE OF A PHOTOLI...
- Publication number 20110255065
- Publication date Oct 20, 2011
- Sergey Oshemkov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR CREATING, TRAPPING AND MANIPULATING A GAS BUBBLE IN LIQUID
- Publication number 20110036991
- Publication date Feb 17, 2011
- PIXER TECHNOLOGY LTD.
- Sergey Oshemkov
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
APPARATUS AND METHOD FOR INDUCING CONTROLLABLE JETS IN LIQUIDS
- Publication number 20090000665
- Publication date Jan 1, 2009
- Sergey OSHEMKOV
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
Subsurface Reticle
- Publication number 20080165406
- Publication date Jul 10, 2008
- Ehud Galun
- G02 - OPTICS
Information Patent Application
Method for correcting critical dimension variations in photomasks
- Publication number 20070065729
- Publication date Mar 22, 2007
- Eitan Zait
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for reparing defected photomasks
- Publication number 20050084767
- Publication date Apr 21, 2005
- Eitan Zait
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Sergey V Oshemkov

Person

Patents Grantslast 30 patents

Method for removing a particle from a mask system

Critical dimension variation correction in extreme ultraviolet lith...

Critical dimension variation correction in extreme ultraviolet lith...

Surface defect repair by irradiation

Controllable transmission and phase compensation of transparent mat...

Method and apparatus for modifying a substrate surface of a photoli...

Apparatus and method for inducing controllable jets in liquids

Method for correcting critical dimension variations in photomasks

Method and system for repairing defected photomasks

Patents Applicationslast 30 patents

METHOD FOR REMOVING A PARTICLE FROM A MASK SYSTEM

CRITICAL DIMENSION VARIATION CORRECTION IN EXTREME ULTRAVIOLET LITH...

CRITICAL DIMENSION VARIATION CORRECTION IN EXTREME ULTRAVIOLET LITH...

SURFACE DEFECT REPAIR BY IRRADIATION

CONTROLLABLE TRANSMISSION AND PHASE COMPENSATION OF TRANSPARENT MAT...

METHOD AND APPARATUS FOR MODIFYING A SUBSTRATE SURFACE OF A PHOTOLI...

METHOD FOR CREATING, TRAPPING AND MANIPULATING A GAS BUBBLE IN LIQUID

APPARATUS AND METHOD FOR INDUCING CONTROLLABLE JETS IN LIQUIDS

Subsurface Reticle

Method for correcting critical dimension variations in photomasks

Method and system for reparing defected photomasks