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Sergey Yulin
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Jena, DE
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last 30 patents
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Patent Grant
Monochromator mirror for the EUV-spectral range
Patent number
7,173,759
Issue date
Feb 6, 2007
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Torsten Feigl
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
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last 30 patents
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Monochromator mirror for the euv-spectral range
Publication number
20050128571
Publication date
Jun 16, 2005
Torsten Feigl
G02 - OPTICS