Sergey Zalubovsky

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Transmission small-angle X-ray scattering metrology system
- Patent number 11,519,719
- Issue date Dec 6, 2022
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Full beam metrology for x-ray scatterometry systems
- Patent number 11,313,816
- Issue date Apr 26, 2022
- KLA Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Full beam metrology for X-ray scatterometry systems
- Patent number 10,775,323
- Issue date Sep 15, 2020
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transmission small-angle X-ray scattering metrology system
- Patent number 10,767,978
- Issue date Sep 8, 2020
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Liquid metal rotating anode X-ray source for semiconductor metrology
- Patent number 10,748,736
- Issue date Aug 18, 2020
- KLA-Tencor Corporation
- Sergey Zalubovsky
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Full Beam Metrology For X-Ray Scatterometry Systems
- Publication number 20220268714
- Publication date Aug 25, 2022
- KLA Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Transmission Small-Angle X-Ray Scattering Metrology System
- Publication number 20210088325
- Publication date Mar 25, 2021
- KLA Corporation
- Andrei V. Shchegrov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Full Beam Metrology For X-Ray Scatterometry Systems
- Publication number 20200300790
- Publication date Sep 24, 2020
- KLA Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Liquid Metal Rotating Anode X-Ray Source For Semiconductor Metrology
- Publication number 20190115184
- Publication date Apr 18, 2019
- KLA-Tencor Corporation
- Sergey Zalubovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission Small-Angle X-Ray Scattering Metrology System
- Publication number 20180299259
- Publication date Oct 18, 2018
- KLA-Tencor Corporation
- Andrei V. Shchegrov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Full Beam Metrology For X-Ray Scatterometry Systems
- Publication number 20180106735
- Publication date Apr 19, 2018
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G01 - MEASURING TESTING