Sergio Edelstein

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Coils for generating a plasma and for sputtering
- Patent number 8,398,832
- Issue date Mar 19, 2013
- Applied Materials Inc.
- Jaim Nulman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for controlling deposition of a charge on a waf...
- Patent number 7,893,703
- Issue date Feb 22, 2011
- KLA-Tencor Technologies Corp.
- Jeffrey A. Rzepiela
- G01 - MEASURING TESTING
Information Patent Grant
Systems configured to perform a non-contact method for determining...
- Patent number 7,719,294
- Issue date May 18, 2010
- KLA-Tencor Technologies Corp.
- Amin Samsavar
- G01 - MEASURING TESTING
Information Patent Grant
Contactless charge measurement of product wafers and control of cor...
- Patent number 7,538,333
- Issue date May 26, 2009
- KLA-Tencor Technologies Corporation
- Amin Samsavar
- G01 - MEASURING TESTING
Information Patent Grant
Optical system for measuring samples using short wavelength radiation
- Patent number 7,369,233
- Issue date May 6, 2008
- KLA-Tencor Technologies Corporation
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Grant
Corona based charge voltage measurement
- Patent number 7,345,306
- Issue date Mar 18, 2008
- KLA-Tencor Technologies Corporation
- Sergio Edelstein
- G01 - MEASURING TESTING
Information Patent Grant
Contactless charge measurement of product wafers and control of cor...
- Patent number 7,248,062
- Issue date Jul 24, 2007
- KLA-Tencor Technologies Corp.
- Amin Samsavar
- G01 - MEASURING TESTING
Information Patent Grant
Corona based charge voltage measurement
- Patent number 7,098,050
- Issue date Aug 29, 2006
- KLA-Tencor Technologies Corporation
- Sergio Edelstein
- G01 - MEASURING TESTING
Information Patent Grant
Coils for generating a plasma and for sputtering
- Patent number 6,783,639
- Issue date Aug 31, 2004
- Applied Materials
- Jaim Nulman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant chamber applicator for remote plasma source
- Patent number 6,603,269
- Issue date Aug 5, 2003
- Applied Materials, Inc.
- Be Van Vo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coils for generating a plasma and for sputtering
- Patent number 6,368,469
- Issue date Apr 9, 2002
- Applied Materials, Inc.
- Jaim Nulman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alternate steps of IMP and sputtering process to improve sidewall c...
- Patent number 6,350,353
- Issue date Feb 26, 2002
- Applied Materials, Inc.
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spin-rinse-drying process for electroplated semiconductor wafers
- Patent number 6,290,865
- Issue date Sep 18, 2001
- Applied Materials, Inc.
- Mark Lloyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Active shield for generating a plasma for sputtering
- Patent number 6,254,737
- Issue date Jul 3, 2001
- Applied Materials, Inc.
- Sergio Edelstein
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Recessed coil for generating a plasma
- Patent number 6,254,746
- Issue date Jul 3, 2001
- Applied Materials, Inc.
- Anantha Subramani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrical connector for power transmission in an electrostatic chuck
- Patent number 5,908,334
- Issue date Jun 1, 1999
- Applied Materials, Inc.
- Aihua Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer heater assembly
- Patent number 5,796,074
- Issue date Aug 18, 1998
- Applied Materials, Inc.
- Sergio Edelstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature polyimide electrostatic chuck
- Patent number 5,691,876
- Issue date Nov 25, 1997
- Applied Materials, Inc.
- Aihua Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable cell size collimator
- Patent number 5,650,052
- Issue date Jul 22, 1997
- Sergio Edelstein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
COILS FOR GENERATING A PLASMA AND FOR SPUTTERING
- Publication number 20130168232
- Publication date Jul 4, 2013
- Jaim NULMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Controlling Deposition of a Charge on a Waf...
- Publication number 20070069759
- Publication date Mar 29, 2007
- KLA-TENCOR TECHNOLOGIES CORP.
- Jeffrey A. Rzepiela
- G01 - MEASURING TESTING
Information Patent Application
Coils for generating a plasma and for sputtering
- Publication number 20060070875
- Publication date Apr 6, 2006
- APPLIED MATERIALS, INC.
- Jaim Nulman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Coils for generating a plasma and for sputtering
- Publication number 20040256217
- Publication date Dec 23, 2004
- Jaim Nulman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical system for measuring samples using short wavelength radiation
- Publication number 20040150820
- Publication date Aug 5, 2004
- Mehrdad Nikoonahad
- G01 - MEASURING TESTING
Information Patent Application
Small volume electroplating cell
- Publication number 20040104119
- Publication date Jun 3, 2004
- APPLIED MATERIALS, INC.
- Sergio Edelstein
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Coils for generating a plasma and for sputtering
- Publication number 20020144901
- Publication date Oct 10, 2002
- Jaim Nulman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Alternate steps of IMP and sputtering process to improve sidewall c...
- Publication number 20020084181
- Publication date Jul 4, 2002
- APPLIED MATERIALS, INC.
- Praburam Gopalraja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Recessed coil for generating a plasma
- Publication number 20010019016
- Publication date Sep 6, 2001
- Anantha Subramani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATE STEPS OF IMP AND SPUTTERING PROCESS TO IMPROVE SIDEWALL C...
- Publication number 20010003607
- Publication date Jun 14, 2001
- PRABURAM GOPALRAJA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Sergio Edelstein

Person

Patents Grantslast 30 patents

Coils for generating a plasma and for sputtering

Systems and methods for controlling deposition of a charge on a waf...

Systems configured to perform a non-contact method for determining...

Contactless charge measurement of product wafers and control of cor...

Optical system for measuring samples using short wavelength radiation

Corona based charge voltage measurement

Contactless charge measurement of product wafers and control of cor...

Corona based charge voltage measurement

Coils for generating a plasma and for sputtering

Resonant chamber applicator for remote plasma source

Coils for generating a plasma and for sputtering

Alternate steps of IMP and sputtering process to improve sidewall c...

Spin-rinse-drying process for electroplated semiconductor wafers

Active shield for generating a plasma for sputtering

Recessed coil for generating a plasma

Electrical connector for power transmission in an electrostatic chuck

Wafer heater assembly

High temperature polyimide electrostatic chuck

Variable cell size collimator

Patents Applicationslast 30 patents

COILS FOR GENERATING A PLASMA AND FOR SPUTTERING

Systems and Methods for Controlling Deposition of a Charge on a Waf...

Coils for generating a plasma and for sputtering

Coils for generating a plasma and for sputtering

Optical system for measuring samples using short wavelength radiation

Small volume electroplating cell

Coils for generating a plasma and for sputtering

Alternate steps of IMP and sputtering process to improve sidewall c...

Recessed coil for generating a plasma

ALTERNATE STEPS OF IMP AND SPUTTERING PROCESS TO IMPROVE SIDEWALL C...