Sergio Shoji

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate carrier using a proportional thermal fluid delivery system
- Patent number 11,615,973
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Phillip Criminale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for dechucking wafers
- Patent number 11,171,030
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Hamid Noorbakhsh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly having a dielectric filler
- Patent number 10,930,540
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feedforward temperature control for plasma processing apparatus
- Patent number 10,854,425
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Chetan Mahadeswaraswamy
- G05 - CONTROLLING REGULATING
Information Patent Grant
Radio frequency (RF) pulsing impedance tuning with multiplier mode
- Patent number 10,854,427
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Katsumasa Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for de-chucking a workpiece using a swing volt...
- Patent number 10,784,132
- Issue date Sep 22, 2020
- Applied Materials, Inc.
- Haitao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with reduced backside plasma ignition
- Patent number 10,745,807
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Haitao Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method, apparatus and system for wafer dechucking using dynamic vol...
- Patent number 10,546,731
- Issue date Jan 28, 2020
- Applied Materials, Inc.
- Haitao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly having a dielectric filler
- Patent number 10,504,765
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrier using a proportional thermal fluid delivery system
- Patent number 10,490,429
- Issue date Nov 26, 2019
- Applied Materials, Inc.
- Phillip Criminale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF power delivery regulation for processing substrates
- Patent number 10,468,233
- Issue date Nov 5, 2019
- Applied Materials, Inc.
- Katsumasa Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with reduced backside plasma ignition
- Patent number 10,378,108
- Issue date Aug 13, 2019
- Applied Materials, Inc.
- Haitao Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for de-chucking a workpiece using a swing volt...
- Patent number 10,242,893
- Issue date Mar 26, 2019
- Applied Materials, Inc.
- Haitao Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Recursive pumping for symmetrical gas exhaust to control critical d...
- Patent number 9,909,213
- Issue date Mar 6, 2018
- Applied Materials, Inc.
- Sergio Fukuda Shoji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF power delivery with approximated saw tooth wave pulsing
- Patent number 9,788,405
- Issue date Oct 10, 2017
- Applied Materials, Inc.
- Katsumasa Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF power delivery regulation for processing substrates
- Patent number 9,741,539
- Issue date Aug 22, 2017
- Applied Materials, Inc.
- Katsumasa Kawasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component temperature control by coolant flow control and heater du...
- Patent number 9,639,097
- Issue date May 2, 2017
- Applied Materials, Inc.
- Chetan Mahadeswaraswamy
- G05 - CONTROLLING REGULATING
Information Patent Grant
Feedforward temperature control for plasma processing apparatus
- Patent number 9,338,871
- Issue date May 10, 2016
- Applied Materials, Inc.
- Chetan Mahadeswaraswamy
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods for etching materials using synchronized RF pulses
- Patent number 9,269,587
- Issue date Feb 23, 2016
- Applied Materials, Inc.
- Daisuke Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Synchronized radio frequency pulsing for plasma etching
- Patent number 8,962,488
- Issue date Feb 24, 2015
- Applied Materials, Inc.
- Bryan Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Component temperature control by coolant flow control and heater du...
- Patent number 8,880,227
- Issue date Nov 4, 2014
- Applied Materials, Inc.
- Chetan Mahadeswaraswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for tuning matching networks
- Patent number 8,513,889
- Issue date Aug 20, 2013
- Applied Materials, Inc.
- Chunlei Zhang
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Synchronized radio frequency pulsing for plasma etching
- Patent number 8,404,598
- Issue date Mar 26, 2013
- Applied Materials, Inc.
- Bryan Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for operating an electrostatic chuck in a semi...
- Patent number 6,898,065
- Issue date May 24, 2005
- Brad Mays
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Serial transmission system for controlling a network of I/O devices
- Patent number 5,721,737
- Issue date Feb 24, 1998
- SMC Pneumatics, Inc.
- Bahman Radjabi
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220130642
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Katsumasa KAWASAKI
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR REDUCTION OR PREVENTION OF ARCING IN A SUBSTRATE SUPPORT
- Publication number 20200411355
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Hamid NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR DECHUCKING WAFERS
- Publication number 20200357675
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- HAMID NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIZONE FLOW DISTRIBUTION SYSTEM
- Publication number 20200312680
- Publication date Oct 1, 2020
- Applied Materials Inc.
- DAISUKE SHIMIZU
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
RADIO FREQUENCY (RF) PULSING IMPEDANCE TUNING WITH MULTIPLIER MODE
- Publication number 20200075290
- Publication date Mar 5, 2020
- Applied Materials, Inc.
- KATSUMASA KAWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLY HAVING A DIELECTRIC FILLER
- Publication number 20200066566
- Publication date Feb 27, 2020
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PLASMA LINERS WITH HIGH FLUID CONDUCTANCE
- Publication number 20200066493
- Publication date Feb 27, 2020
- Applied Materials, Inc.
- HAMID NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM
- Publication number 20200051839
- Publication date Feb 13, 2020
- Applied Materials, Inc.
- Phillip Criminale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION
- Publication number 20190271082
- Publication date Sep 5, 2019
- Applied Materials, Inc.
- Haitao WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DE-CHUCKING A WORKPIECE USING A SWING VOLT...
- Publication number 20190189481
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- Haitao Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
METHOD AND APPARATUS FOR DE-CHUCKING A WORKPIECE USING A SWING VOLT...
- Publication number 20180366359
- Publication date Dec 20, 2018
- Applied Materials, Inc.
- Haitao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck Assembly Having A Dielectric Filler
- Publication number 20180308736
- Publication date Oct 25, 2018
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECURSIVE PUMPING FOR SYMMETRICAL GAS EXHAUST TO CONTROL CRITICAL D...
- Publication number 20180142354
- Publication date May 24, 2018
- Applied Materials, Inc.
- Sergio Fukuda SHOJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF POWER DELIVERY REGULATION FOR PROCESSING SUBSTRATES
- Publication number 20170358428
- Publication date Dec 14, 2017
- Applied Materials, Inc.
- Katsumasa KAWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION
- Publication number 20170101713
- Publication date Apr 13, 2017
- Applied Materials, Inc.
- Haitao WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF POWER DELIVERY REGULATION FOR PROCESSING SUBSTRATES
- Publication number 20170098527
- Publication date Apr 6, 2017
- Applied Materials, Inc.
- Katsumasa KAWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RF POWER DELIVERY WITH APPROXIMATED SAW TOOTH WAVE PULSING
- Publication number 20170099722
- Publication date Apr 6, 2017
- Applied Materials, Inc.
- KATSUMASA KAWASAKI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
- Publication number 20160155612
- Publication date Jun 2, 2016
- Chetan MAHADESWARASWAMY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM
- Publication number 20160148822
- Publication date May 26, 2016
- Phillip Criminale
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT TEMPERATURE CONTROL BY COOLANT FLOW CONTROL AND HEATER DU...
- Publication number 20150134128
- Publication date May 14, 2015
- Applied Materials, Inc.
- Chetan MAHADESWARASWAMY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR ETCHING MATERIALS USING SYNCHRONIZED RF PULSES
- Publication number 20150072530
- Publication date Mar 12, 2015
- Applied Materials, Inc.
- Jong Mun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECURSIVE PUMPING FOR SYMMETRICAL GAS EXHAUST TO CONTROL CRITICAL D...
- Publication number 20150041061
- Publication date Feb 12, 2015
- Applied Materials, Inc.
- Sergio Fukuda SHOJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCH PROCESS HAVING ADAPTIVE CONTROL WITH ETCH DEPTH OF PRESSURE AN...
- Publication number 20140342570
- Publication date Nov 20, 2014
- Applied Materials, Inc.
- Kenny Linh Doan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED ALGORITHM FOR TUNING OF FEEDFORWARD CONTROL PARAMETERS IN...
- Publication number 20140224767
- Publication date Aug 14, 2014
- Walter R. MERRY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYNCHRONIZED RADIO FREQUENCY PULSING FOR PLASMA ETCHING
- Publication number 20130213935
- Publication date Aug 22, 2013
- Applied Materials, Inc.
- BRYAN LIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT TEMPERATURE CONTROL BY COOLANT FLOW CONTROL AND HEATER DU...
- Publication number 20120048467
- Publication date Mar 1, 2012
- Applied Materials, Inc.
- Chetan Mahadeswaraswamy
- G05 - CONTROLLING REGULATING
Information Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
- Publication number 20110186545
- Publication date Aug 4, 2011
- Applied Materials, Inc.
- Chetan MAHADESWARASWAMY
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS AND APPARATUS FOR TUNING MATCHING NETWORKS
- Publication number 20110162798
- Publication date Jul 7, 2011
- Applied Materials, Inc.
- CHUNLEI ZHANG
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SYNCHRONIZED RADIO FREQUENCY PULSING FOR PLASMA ETCHING
- Publication number 20110031216
- Publication date Feb 10, 2011
- Applied Materials, Inc.
- BRYAN LIAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for performing real time arcing detection
- Publication number 20040031699
- Publication date Feb 19, 2004
- APPLIED MATERIALS, INC.
- Sergio Fukuda Shoji
- H01 - BASIC ELECTRIC ELEMENTS

Sergio Shoji

Person

Patents Grantslast 30 patents

Substrate carrier using a proportional thermal fluid delivery system

Methods and apparatus for dechucking wafers

Electrostatic chuck assembly having a dielectric filler

Feedforward temperature control for plasma processing apparatus

Radio frequency (RF) pulsing impedance tuning with multiplier mode

Method and apparatus for de-chucking a workpiece using a swing volt...

Showerhead with reduced backside plasma ignition

Method, apparatus and system for wafer dechucking using dynamic vol...

Electrostatic chuck assembly having a dielectric filler

Substrate carrier using a proportional thermal fluid delivery system

RF power delivery regulation for processing substrates

Showerhead with reduced backside plasma ignition

Method and apparatus for de-chucking a workpiece using a swing volt...

Recursive pumping for symmetrical gas exhaust to control critical d...

RF power delivery with approximated saw tooth wave pulsing

RF power delivery regulation for processing substrates

Component temperature control by coolant flow control and heater du...

Feedforward temperature control for plasma processing apparatus

Methods for etching materials using synchronized RF pulses

Synchronized radio frequency pulsing for plasma etching

Component temperature control by coolant flow control and heater du...

Methods and apparatus for tuning matching networks

Synchronized radio frequency pulsing for plasma etching

Method and apparatus for operating an electrostatic chuck in a semi...

Serial transmission system for controlling a network of I/O devices

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

APPARATUS FOR REDUCTION OR PREVENTION OF ARCING IN A SUBSTRATE SUPPORT

METHODS AND APPARATUS FOR DECHUCKING WAFERS

MULTIZONE FLOW DISTRIBUTION SYSTEM

RADIO FREQUENCY (RF) PULSING IMPEDANCE TUNING WITH MULTIPLIER MODE

ELECTROSTATIC CHUCK ASSEMBLY HAVING A DIELECTRIC FILLER

METHODS AND APPARATUS FOR PLASMA LINERS WITH HIGH FLUID CONDUCTANCE

SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM

SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION

METHOD AND APPARATUS FOR DE-CHUCKING A WORKPIECE USING A SWING VOLT...

METHOD AND APPARATUS FOR DE-CHUCKING A WORKPIECE USING A SWING VOLT...

Electrostatic Chuck Assembly Having A Dielectric Filler

RECURSIVE PUMPING FOR SYMMETRICAL GAS EXHAUST TO CONTROL CRITICAL D...

RF POWER DELIVERY REGULATION FOR PROCESSING SUBSTRATES

SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION

RF POWER DELIVERY REGULATION FOR PROCESSING SUBSTRATES

RF POWER DELIVERY WITH APPROXIMATED SAW TOOTH WAVE PULSING

FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS

SUBSTRATE CARRIER USING A PROPORTIONAL THERMAL FLUID DELIVERY SYSTEM

COMPONENT TEMPERATURE CONTROL BY COOLANT FLOW CONTROL AND HEATER DU...

METHODS FOR ETCHING MATERIALS USING SYNCHRONIZED RF PULSES

RECURSIVE PUMPING FOR SYMMETRICAL GAS EXHAUST TO CONTROL CRITICAL D...

ETCH PROCESS HAVING ADAPTIVE CONTROL WITH ETCH DEPTH OF PRESSURE AN...

AUTOMATED ALGORITHM FOR TUNING OF FEEDFORWARD CONTROL PARAMETERS IN...

SYNCHRONIZED RADIO FREQUENCY PULSING FOR PLASMA ETCHING

COMPONENT TEMPERATURE CONTROL BY COOLANT FLOW CONTROL AND HEATER DU...

FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS

METHODS AND APPARATUS FOR TUNING MATCHING NETWORKS

SYNCHRONIZED RADIO FREQUENCY PULSING FOR PLASMA ETCHING

Method for performing real time arcing detection