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Sergiu Langa
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Dresden, DE
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Patents Grants
last 30 patents
Information
Patent Grant
MEMS and method of manufacturing the same
Patent number
11,186,478
Issue date
Nov 30, 2021
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Sergiu Langa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrostatically deflectable micromechanical device
Patent number
10,483,876
Issue date
Nov 19, 2019
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung E.V.
Sergiu Langa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS transducer for interacting with a volume flow of a fluid and m...
Patent number
10,457,544
Issue date
Oct 29, 2019
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Harald Schenk
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical device with an actively deflectable element
Patent number
9,676,607
Issue date
Jun 13, 2017
Fraunhofer Gesellschaft zur Foerderung der angewandten Forschung e.V.
Matthieu Gaudet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Production method
Patent number
9,620,375
Issue date
Apr 11, 2017
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Sergiu Langa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR LASER-BASED SINGULATING OF MICROCHIPS ON STRUCTURED SUBS...
Publication number
20240258171
Publication date
Aug 1, 2024
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Sergiu LANGA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEMS with cover drive and method of operating the same
Publication number
20230322546
Publication date
Oct 12, 2023
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Sergiu LANGA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS FOR HIGHLY EFFICIENT INTERACTION WITH A VOLUME FLOW
Publication number
20230091340
Publication date
Mar 23, 2023
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
Anton MELNIKOV
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DRIVE FOR MOVING OBJECTS
Publication number
20220380201
Publication date
Dec 1, 2022
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
Bert KAISER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS HAVING A LARGE FLUIDICALLY EFFECTIVE SURFACE
Publication number
20220002143
Publication date
Jan 6, 2022
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
Sergiu LANGA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS AND METHOD OF MANUFACTURING THE SAME
Publication number
20190382257
Publication date
Dec 19, 2019
Sergiu LANGA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND M...
Publication number
20180179048
Publication date
Jun 28, 2018
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
Harald SCHENK
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL DEVICE WITH AN ACTIVELY DEFLECTABLE ELEMENT
Publication number
20160304333
Publication date
Oct 20, 2016
Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
Matthieu Gaudet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROSTATICALLY DEFLECTABLE MICROMECHANICAL DEVICE
Publication number
20160173001
Publication date
Jun 16, 2016
Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
Sergiu Langa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRODUCTION METHOD
Publication number
20150200105
Publication date
Jul 16, 2015
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
Sergiu LANGA
G02 - OPTICS