Sergiy Yulin

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Multilayer mirror for reflecting EUV radiation and method for produ...
- Patent number 11,500,137
- Issue date Nov 15, 2022
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Philipp Naujok
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Thermally stable multilayer mirror for the EUV spectral range
- Patent number 7,986,455
- Issue date Jul 26, 2011
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Torsten Feigl
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Thermally stable multilayer mirror for the EUV spectral region
- Patent number 7,920,323
- Issue date Apr 5, 2011
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Nicolas Benoit
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Multilayer Mirror for Reflecting EUV Radiation and Method for Produ...
- Publication number 20190235141
- Publication date Aug 1, 2019
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Philipp Naujok
- B82 - NANO-TECHNOLOGY
Information Patent Application
Thermally Stable Multilayer Mirror for the EUV Spectral Range
- Publication number 20090009858
- Publication date Jan 8, 2009
- Torsten Feigl
- G02 - OPTICS
Information Patent Application
Thermally Stable Multilayer Mirror for the Euv Spectral Region
- Publication number 20080088916
- Publication date Apr 17, 2008
- Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
- Nicolas Benoit
- G02 - OPTICS