Membership
Tour
Register
Log in
Serkan Kincal
Follow
Person
San Diego, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Target material control in an EUV light source
Patent number
11,963,285
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Abhiram Lakshmi Ganesh Govindaraju
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
ROBUST FLUID COUPLING APPARATUS
Publication number
20230279974
Publication date
Sep 7, 2023
ASML NETHERLANDS B.V.
Benjamin Andrew Sams
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Application
TARGET MATERIAL CONTROL IN AN EUV LIGHT SOURCE
Publication number
20220159817
Publication date
May 19, 2022
ASML NETHERLANDS B.V.
Abhiram Lakshmi Ganesh Govindaraju
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY