Serkan Kincal

Person

  • San Diego, CA, US

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    ROBUST FLUID COUPLING APPARATUS

    • Publication number 20230279974
    • Publication date Sep 7, 2023
    • ASML NETHERLANDS B.V.
    • Benjamin Andrew Sams
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    TARGET MATERIAL CONTROL IN AN EUV LIGHT SOURCE

    • Publication number 20220159817
    • Publication date May 19, 2022
    • ASML NETHERLANDS B.V.
    • Abhiram Lakshmi Ganesh Govindaraju
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY