Seshu NIMMALA

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Beaverton, OR, US

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Patents Applicationslast 30 patents

Information Patent Application
HIGH TEMPERATURE SUBSTRATE SUPPORT WITH HEAT SPREADER
- Publication number 20230073259
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER RING TO PEDESTAL KINEMATIC MOUNT FOR SUBSTRATE PROCESSING T...
- Publication number 20220415624
- Publication date Dec 29, 2022
- LAM RESEARCH CORPORATION
- Nick Ray LINEBARGER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...