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Sethuraman Lakshminarayanan
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San Jose, CA, US
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last 30 patents
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Patent Grant
Polycrystalline silicon activation RTA
Patent number
8,252,640
Issue date
Aug 28, 2012
Ravindra M. Kapre
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for creating barrier layers for copper diffusion
Patent number
6,998,343
Issue date
Feb 14, 2006
LSI Logic Corporation
Grace Sun
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Low resistance metal interconnect lines and a process for fabricati...
Patent number
6,815,342
Issue date
Nov 9, 2004
LSI Logic Corporation
Chuan-cheng Cheng
H01 - BASIC ELECTRIC ELEMENTS