Seungbu BAEK

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Hwaseong-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing chamber, substrate processing system including...
- Patent number 12,191,190
- Issue date Jan 7, 2025
- Samsung Electronics Co., Ltd.
- Yongmyung Jun
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUPERCRITICAL FLUID PROCESSING APPARATUS AND SUBSTRATE PROCESSING S...
- Publication number 20230046595
- Publication date Feb 16, 2023
- Samsung Electronics Co., Ltd.
- Seohyun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20230043451
- Publication date Feb 9, 2023
- Samsung Electronics Co., Ltd.
- Yongmyung JUN
- H01 - BASIC ELECTRIC ELEMENTS