Seunghan BAEK

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Busan, KR

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,183,555
- Issue date Dec 31, 2024
- Samsung Electronics Co., Ltd.
- Seunghan Baek
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20230143049
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- Seunghan Baek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, AND...
- Publication number 20230143327
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- DONGSEOK HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CONFINEMENT RING, SEMICONDUCTOR MANUFACTURING APPARATUS INCL...
- Publication number 20220351947
- Publication date Nov 3, 2022
- Samsung Electronics Co., Ltd.
- Kuihyun YOON
- H01 - BASIC ELECTRIC ELEMENTS