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Seungmin SHIN
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SUWON-SI, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate transferring unit, substrate processing apparatus, and su...
Patent number
11,881,426
Issue date
Jan 23, 2024
Samsung Electronics Co., Ltd.
Sangjine Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus including light source supplying light to wafer and windo...
Patent number
11,798,801
Issue date
Oct 24, 2023
Samsung Electronics Co., Ltd.
Hunjae Jang
B08 - CLEANING
Information
Patent Grant
Apparatus including light source supplying light to wafer and windo...
Patent number
11,482,410
Issue date
Oct 25, 2022
Samsung Electronics Co., Ltd.
Hunjae Jang
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...
Publication number
20240120232
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Sangjine Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER ETCHING (ALE) APPARATUS AND ALE METHOD BASED ON THE AP...
Publication number
20240030038
Publication date
Jan 25, 2024
Samsung Electronics Co., Ltd.
Seungmin Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFERRING UNIT, SUBSTRATE PROCESSING APPARATUS, AND SU...
Publication number
20230062447
Publication date
Mar 2, 2023
Samsung Electronics Co., Ltd.
Sangjine Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE ROTATING APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLUDING...
Publication number
20230046060
Publication date
Feb 16, 2023
Samsung Electronics Co., Ltd.
SANGJINE PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER-CLEANING APPARATUS INCLUDING A WINDOW PROTECTOR AND A METHOD...
Publication number
20220230872
Publication date
Jul 21, 2022
Samsung Electronics Co., Ltd.
Hunjae JANG
H01 - BASIC ELECTRIC ELEMENTS