Severin Waldis

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Bern, CH

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Patents Grantslast 30 patents

Information Patent Grant
Optical component
- Patent number 10,078,271
- Issue date Sep 18, 2018
- Carl Zeiss SMT GmbH
- Severin Waldis
- G02 - OPTICS
Information Patent Grant
Optical system for a microlithographic projection exposure apparatu...
- Patent number 9,946,161
- Issue date Apr 17, 2018
- Carl Zeiss SMT GmbH
- Ingo Saenger
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical component
- Patent number 9,804,501
- Issue date Oct 31, 2017
- Carl Zeiss SMT GmbH
- Severin Waldis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror array
- Patent number 9,791,691
- Issue date Oct 17, 2017
- Carl Zeiss SMT GmbH
- Severin Waldis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microlithographic projection exposure apparatus
- Patent number 9,535,336
- Issue date Jan 3, 2017
- Carl Zeiss SMT GmbH
- Sascha Bleidistel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system of a microlithographic projection exposure appa...
- Patent number 9,523,922
- Issue date Dec 20, 2016
- Carl Zeiss SMT GmbH
- Florian Bach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light modulator and illumination system of a microlithographic proj...
- Patent number 9,274,434
- Issue date Mar 1, 2016
- Carl Zeiss SMT GmbH
- Armin Werber
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR REGULATING THE TILTING OF A MIRROR ELEMENT
- Publication number 20150185469
- Publication date Jul 2, 2015
- Carl Zeiss SMT GMBH
- Jan Horn
- G02 - OPTICS
Information Patent Application
MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
- Publication number 20140333912
- Publication date Nov 13, 2014
- Carl Zeiss SMT GMBH
- Sascha Bleidistel
- G02 - OPTICS
Information Patent Application
OPTICAL COMPONENT
- Publication number 20140327895
- Publication date Nov 6, 2014
- Severin Waldis
- G02 - OPTICS
Information Patent Application
OPTICAL COMPONENT
- Publication number 20140327896
- Publication date Nov 6, 2014
- Severin Waldis
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20140307239
- Publication date Oct 16, 2014
- Florian Bach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LIGHT MODULATOR AND ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJ...
- Publication number 20140218708
- Publication date Aug 7, 2014
- Armin Werber
- G02 - OPTICS
Information Patent Application
MIRROR ARRAY
- Publication number 20140055767
- Publication date Feb 27, 2014
- Severin Waldis
- G02 - OPTICS