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Seyang Park
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Beaverton, OR, US
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last 30 patents
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Patent Grant
Method and apparatus for electroplating
Patent number
8,308,931
Issue date
Nov 13, 2012
Novellus Systems, Inc.
Jonathan Reid
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Two step process for uniform across wafer deposition and void free...
Patent number
7,799,684
Issue date
Sep 21, 2010
Novellus Systems, Inc.
Jonathan Reid
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Anneal of ruthenium seed layer to improve copper plating
Patent number
7,442,267
Issue date
Oct 28, 2008
Novellus Systems, Inc.
Eric G. Webb
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information
Patent Grant
Methods for the electrochemical deposition of copper onto a barrier...
Patent number
7,405,157
Issue date
Jul 29, 2008
Novellus Systems, Inc.
Jon Reid
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for electroplating
Publication number
20100032310
Publication date
Feb 11, 2010
Novellus Systems, Inc.
Jonathan Reid
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR