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Seyoon KIM
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Hwaseong-si, KR
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Patents Grants
last 30 patents
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Patent Grant
Ultrapure water supply apparatus, substrate processing system inclu...
Patent number
12,122,702
Issue date
Oct 22, 2024
Samsung Electronics Co., Ltd.
Jongha Yun
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
ULTRAPURE WATER SUPPLY APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLU...
Publication number
20240417301
Publication date
Dec 19, 2024
Samsung Electronics Co., Ltd.
Jongha YUN
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information
Patent Application
ULTRAPURE WATER SUPPLY APPARATUS, SUBSTRATE PROCESSING SYSTEM INCLU...
Publication number
20230302502
Publication date
Sep 28, 2023
Samsung Electronics Co., Ltd.
Jongha YUN
B08 - CLEANING
Information
Patent Application
ULTRAPURE WATER SUPPLYING APPARATUS, SUBSTRATE PROCESSING SYSTEM IN...
Publication number
20230278900
Publication date
Sep 7, 2023
Samsung Electronics Co., Ltd.
DONGCHEOL KUK
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information
Patent Application
ULTRAPURE WATER PRODUCTION FACILITY
Publication number
20230264998
Publication date
Aug 24, 2023
Samsung Electronics Co., Ltd.
Eunhye PARK
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE