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last 30 patents
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Patent Grant
Multi-zone temperature control plasma reactor
Patent number
12,094,695
Issue date
Sep 17, 2024
ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
Tuqiang Ni
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MULTI-ZONE TEMPERATURE CONTROL PLASMA REACTOR
Publication number
20200161104
Publication date
May 21, 2020
Advanced Micro-Fabrication Equipment Inc. China
Tuqiang Ni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ZONE ACTIVE-MATRIX TEMPERATURE CONTROL SYSTEM AND TEMPERATURE...
Publication number
20170186592
Publication date
Jun 29, 2017
ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
Tuqiang Ni
H01 - BASIC ELECTRIC ELEMENTS