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CHARGED PARTICLE BEAM APPARATUS
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Publication number 20230030651
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Publication date Feb 2, 2023
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HITACHI HIGH-TECH CORPORATION
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Yoshifumi SEKIGUCHI
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20220122804
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Publication date Apr 21, 2022
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HITACHI HIGH-TECH CORPORATION
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Apparatus
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Publication number 20210375583
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Publication date Dec 2, 2021
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HITACHI HIGH-TECH CORPORATION
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Shunsuke MIZUTANI
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H01 - BASIC ELECTRIC ELEMENTS
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CHARGED PARTICLE BEAM APPARATUS
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Publication number 20210183614
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Publication date Jun 17, 2021
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HITACHI HIGH-TECH CORPORATION
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Yoshifumi SEKIGUCHI
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G01 - MEASURING TESTING
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Charged Particle Beam Device
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Publication number 20200312615
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Publication date Oct 1, 2020
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HITACHI HIGH-TECH CORPORATION
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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CHARGED-PARTICLE BEAM SYSTEM
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Publication number 20200020504
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Publication date Jan 16, 2020
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Hitachi High-Technologies Corporation
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Akio YAMAMOTO
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Apparatus
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Publication number 20190355552
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Publication date Nov 21, 2019
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Hitachi High-Technologies Corporation
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Shunsuke MIZUTANI
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H01 - BASIC ELECTRIC ELEMENTS
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CHARGED PARTICLE BEAM DEVICE
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Publication number 20190180979
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Publication date Jun 13, 2019
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Hitachi High-Technologies Corporation
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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-
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Charged Particle Beam Apparatus
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Publication number 20180286627
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Publication date Oct 4, 2018
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Hitachi High-Technologies Corporation
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Shinya UENO
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20180269026
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Publication date Sep 20, 2018
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Hitachi High-Technologies Corporation
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Shahedul HOQUE
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G02 - OPTICS
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Charged Particle Beam Device
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Publication number 20170278671
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Publication date Sep 28, 2017
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Hitachi High-Technologies Corporation
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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Charged Particle Beam Device
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Publication number 20160240348
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Publication date Aug 18, 2016
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HITACHI HIGH-TECHNOLOGIES CORPORATION
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Toshiyuki YOKOSUKA
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H01 - BASIC ELECTRIC ELEMENTS
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SCANNING ELECTRON MICROSCOPE
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Publication number 20130306866
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Publication date Nov 21, 2013
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Hitachi High-Technologies Corporation
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Shahedul Hoque
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H01 - BASIC ELECTRIC ELEMENTS