Shahin Zangooie

Person

Hopewell Junction, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Alignment correction system and method of use
- Patent number 8,736,275
- Issue date May 27, 2014
- International Business Machines Corporation
- Robert J. Foster
- G05 - CONTROLLING REGULATING
Information Patent Grant
Alignment correction system and method of use
- Patent number 8,680,871
- Issue date Mar 25, 2014
- International Business Machines Corporation
- Robert J. Foster
- G05 - CONTROLLING REGULATING
Information Patent Grant
Monitoring stage alignment and related stage and calibration target
- Patent number 8,411,270
- Issue date Apr 2, 2013
- International Business Machines Corporation
- Shahin Zangooie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching system and method for forming multiple porous semiconductor...
- Patent number 8,157,978
- Issue date Apr 17, 2012
- International Business Machines Corporation
- Matthew J. Sendelbach
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Characterizing films using optical filter pseudo substrate
- Patent number 8,080,849
- Issue date Dec 20, 2011
- International Business Machines Corporation
- Shahin Zangooie
- G01 - MEASURING TESTING
Information Patent Grant
Wafer and stage alignment using photonic devices
- Patent number 7,808,657
- Issue date Oct 5, 2010
- International Business Machines Corporation
- Shahin Zangooie
- G01 - MEASURING TESTING
Information Patent Grant
Optical measurement using fixed polarizer
- Patent number 7,791,723
- Issue date Sep 7, 2010
- International Business Machines Corporation
- Charles N. Archie
- G01 - MEASURING TESTING
Information Patent Grant
Determining angle of incidence with respect to workpiece
- Patent number 7,742,160
- Issue date Jun 22, 2010
- International Business Machines Corporation
- Clemente Bottini
- G01 - MEASURING TESTING
Information Patent Grant
Determining azimuth angle of incident beam to wafer
- Patent number 7,646,491
- Issue date Jan 12, 2010
- International Business Machines Corporation
- Shahin Zangooie
- G01 - MEASURING TESTING
Information Patent Grant
Alignment correction system and method of use
- Patent number 7,592,817
- Issue date Sep 22, 2009
- International Business Machines Corporation
- Robert J. Foster
- G01 - MEASURING TESTING
Information Patent Grant
Flipping stage arrangement for reduced wafer contamination cross se...
- Patent number 7,542,136
- Issue date Jun 2, 2009
- International Business Machines Corporation
- Shahin Zangooie
- G01 - MEASURING TESTING
Information Patent Grant
Optical spot geometric parameter determination using calibration ta...
- Patent number 7,477,365
- Issue date Jan 13, 2009
- International Business Machines Corporation
- Shahin Zangooie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CONDENSATION-ASSISTED METROLOGY
- Publication number 20170219337
- Publication date Aug 3, 2017
- HGST NETHERLANDS B.V.
- Shahin Zangooie
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT CORRECTION SYSTEM AND METHOD OF USE
- Publication number 20130245993
- Publication date Sep 19, 2013
- International Business Machines Corporation
- Robert J. FOSTER
- G01 - MEASURING TESTING
Information Patent Application
ALIGNMENT CORRECTION SYSTEM AND METHOD OF USE
- Publication number 20130238112
- Publication date Sep 12, 2013
- International Business Machines Corporation
- Robert J. FOSTER
- G01 - MEASURING TESTING
Information Patent Application
ETCHING SYSTEM AND METHOD FOR FORMING MULTIPLE POROUS SEMICONDUCTOR...
- Publication number 20100187126
- Publication date Jul 29, 2010
- International Business Machines Corporation
- Matthew J. Sendelbach
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
OPTICAL MEASUREMENT USING FIXED POLARIZER
- Publication number 20090185168
- Publication date Jul 23, 2009
- International Business Machines Corporation
- Charles N. Archie
- G01 - MEASURING TESTING
Information Patent Application
MONITORING STAGE ALIGNMENT AND RELATED STAGE AND CALIBRATION TARGET
- Publication number 20090185183
- Publication date Jul 23, 2009
- International Business Machines Corporation
- Shahin Zangooie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARACTERIZING FILMS USING OPTICAL FILTER PSEUDO SUBSTRATE
- Publication number 20090186427
- Publication date Jul 23, 2009
- International Business Machines Corporation
- Shahin Zangooie
- G01 - MEASURING TESTING
Information Patent Application
DETERMINING SIGNAL QUALITY OF OPTICAL METROLOGY TOOL
- Publication number 20090182529
- Publication date Jul 16, 2009
- International Business Machines Corporation
- Shahin Zangooie
- G01 - MEASURING TESTING
Information Patent Application
DETERMINING ANGLE OF INCIDENCE WITH RESPECT TO WORKPIECE
- Publication number 20090180108
- Publication date Jul 16, 2009
- International Business Machines Corporation
- Clemente Bottini
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SPOT GEOMETRIC PARAMETER DETERMINATION USING CALIBRATION TA...
- Publication number 20090027660
- Publication date Jan 29, 2009
- Shahin Zangooie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment Correction System and Method of Use
- Publication number 20090021236
- Publication date Jan 22, 2009
- International Business Machines Corporation
- Robert J. Foster
- G05 - CONTROLLING REGULATING
Information Patent Application
FLIPPING STAGE ARRANGEMENT FOR REDUCED WAFER CONTAMINATION CROSS SE...
- Publication number 20090009763
- Publication date Jan 8, 2009
- International Business Machines Corporation
- Shahin Zangooie
- G01 - MEASURING TESTING
Information Patent Application
WAFER AND STAGE ALIGNMENT USING PHOTONIC DEVICES
- Publication number 20090002721
- Publication date Jan 1, 2009
- International Business Machines Corporation
- Shahin Zangooie
- G01 - MEASURING TESTING
Information Patent Application
DETERMINING AZIMUTH ANGLE OF INCIDENT BEAM TO WAFER
- Publication number 20080316471
- Publication date Dec 25, 2008
- International Business Machines Corporation
- Shahin Zangooie
- G01 - MEASURING TESTING
Information Patent Application
Optical spot geometric parameter determination using calibration ta...
- Publication number 20080024781
- Publication date Jan 31, 2008
- International Business Machines Corporation
- Shahin Zangooie
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Shahin Zangooie

Person

Patents Grantslast 30 patents

Alignment correction system and method of use

Alignment correction system and method of use

Monitoring stage alignment and related stage and calibration target

Etching system and method for forming multiple porous semiconductor...

Characterizing films using optical filter pseudo substrate

Wafer and stage alignment using photonic devices

Optical measurement using fixed polarizer

Determining angle of incidence with respect to workpiece

Determining azimuth angle of incident beam to wafer

Alignment correction system and method of use

Flipping stage arrangement for reduced wafer contamination cross se...

Optical spot geometric parameter determination using calibration ta...

Patents Applicationslast 30 patents

CONDENSATION-ASSISTED METROLOGY

ALIGNMENT CORRECTION SYSTEM AND METHOD OF USE

ALIGNMENT CORRECTION SYSTEM AND METHOD OF USE

ETCHING SYSTEM AND METHOD FOR FORMING MULTIPLE POROUS SEMICONDUCTOR...

OPTICAL MEASUREMENT USING FIXED POLARIZER

MONITORING STAGE ALIGNMENT AND RELATED STAGE AND CALIBRATION TARGET

CHARACTERIZING FILMS USING OPTICAL FILTER PSEUDO SUBSTRATE

DETERMINING SIGNAL QUALITY OF OPTICAL METROLOGY TOOL

DETERMINING ANGLE OF INCIDENCE WITH RESPECT TO WORKPIECE

OPTICAL SPOT GEOMETRIC PARAMETER DETERMINATION USING CALIBRATION TA...

Alignment Correction System and Method of Use

FLIPPING STAGE ARRANGEMENT FOR REDUCED WAFER CONTAMINATION CROSS SE...

WAFER AND STAGE ALIGNMENT USING PHOTONIC DEVICES

DETERMINING AZIMUTH ANGLE OF INCIDENT BEAM TO WAFER

Optical spot geometric parameter determination using calibration ta...