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Shahryar Rokni
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Carlsbad, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Four KHz gas discharge laser system
Patent number
6,882,674
Issue date
Apr 19, 2005
Cymer, Inc.
Christian J. Wittak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Four KHz gas discharge laser
Patent number
6,757,316
Issue date
Jun 29, 2004
Cymer, Inc.
Peter C. Newman
G01 - MEASURING TESTING
Information
Patent Grant
Lithography laser with beam delivery and beam pointing control
Patent number
6,704,339
Issue date
Mar 9, 2004
Cymer, Inc.
Leonard Lublin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra pure component purge system for gas discharge laser
Patent number
6,539,042
Issue date
Mar 25, 2003
Cymer, Inc.
Shahryar Rokni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Purge monitoring system for gas discharge laser
Patent number
6,504,860
Issue date
Jan 7, 2003
Cymer, Inc.
Peter C. Newman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automatic fluorine control system
Patent number
6,028,880
Issue date
Feb 22, 2000
Cymer, Inc.
Jason R. Carlesi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluorine control system for excimer lasers
Patent number
5,978,406
Issue date
Nov 2, 1999
Cymer, Inc.
Shahryar Rokni
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Four KHz gas discharge laser system
Publication number
20030118072
Publication date
Jun 26, 2003
Christian J. Wittak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithography laser with beam delivery and beam pointing control
Publication number
20030043876
Publication date
Mar 6, 2003
Leonard Lublin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ULTRA PURE COMPONENT PURGE SYSTEM FOR GAS DISCHARGE LASER
Publication number
20020105996
Publication date
Aug 8, 2002
Shahryar Rokni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Purge monitoring system for gas discharge laser
Publication number
20020101903
Publication date
Aug 1, 2002
Peter C. Newman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Four KHz gas discharge laser
Publication number
20020021728
Publication date
Feb 21, 2002
Peter C. Newman
G01 - MEASURING TESTING