Shai Mark

Person

Kibutz Snir, IL

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic substrate cleaning system and method
- Patent number 12,009,227
- Issue date Jun 11, 2024
- KLA Corporation
- Shai Mark
- B08 - CLEANING
Information Patent Grant
Automatic teaching of substrate handling for production and process...
- Patent number 11,908,722
- Issue date Feb 20, 2024
- KLA Corporation
- Avner Safrani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Active reticle carrier for in situ stage correction
- Patent number 11,774,866
- Issue date Oct 3, 2023
- KLA Corporation
- Avner Safrani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In situ process chamber chuck cleaning by cleaning substrate
- Patent number 11,638,938
- Issue date May 2, 2023
- KLA Corporation
- Mor Azaria
- B08 - CLEANING
Information Patent Grant
Systems and methods for chuck cleaning
- Patent number 11,607,716
- Issue date Mar 21, 2023
- KLA Corporation
- Shai Mark
- B08 - CLEANING
Information Patent Grant
System and method for monitoring parameters of a semiconductor fact...
- Patent number 11,569,138
- Issue date Jan 31, 2023
- KLA Corporation
- Mor Azarya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Teaching Substrate for Production and Process-Control Tools
- Publication number 20240170318
- Publication date May 23, 2024
- KLA Corporation
- Avner Safrani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU PROCESS CHAMBER CHUCK CLEANING BY CLEANING SUBSTRATE
- Publication number 20230264234
- Publication date Aug 24, 2023
- KLA Corporation
- Mor Azaria
- B08 - CLEANING
Information Patent Application
SYSTEM AND METHOD FOR MONITORING PARAMETERS OF A SEMICONDUCTOR FACT...
- Publication number 20230119169
- Publication date Apr 20, 2023
- KLA Corporation
- Mor Azarya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC SUBSTRATE CLEANING SYSTEM AND METHOD
- Publication number 20220359234
- Publication date Nov 10, 2022
- KLA Corporation
- Shai Mark
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVE RETICLE CARRIER FOR IN SITU STAGE CORRECTION
- Publication number 20220066333
- Publication date Mar 3, 2022
- KLA Corporation
- Avner Safrani
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Automatic Teaching of Substrate Handling for Production and Process...
- Publication number 20210074567
- Publication date Mar 11, 2021
- KLA Corporation
- Avner Safrani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In Situ Process Chamber Chuck Cleaning by Cleaning Substrate
- Publication number 20200384509
- Publication date Dec 10, 2020
- KLA Corporation
- Mor Azaria
- B08 - CLEANING
Information Patent Application
System and Method for Monitoring Parameters of a Semiconductor Fact...
- Publication number 20160370797
- Publication date Dec 22, 2016
- KLA-Tencor Corporation
- Mor Azarya
- G05 - CONTROLLING REGULATING

Person

Patents Grantslast 30 patents

Electrostatic substrate cleaning system and method

Automatic teaching of substrate handling for production and process...

Active reticle carrier for in situ stage correction

In situ process chamber chuck cleaning by cleaning substrate

Systems and methods for chuck cleaning

System and method for monitoring parameters of a semiconductor fact...

Patents Applicationslast 30 patents

Teaching Substrate for Production and Process-Control Tools

IN-SITU PROCESS CHAMBER CHUCK CLEANING BY CLEANING SUBSTRATE

SYSTEM AND METHOD FOR MONITORING PARAMETERS OF A SEMICONDUCTOR FACT...

ELECTROSTATIC SUBSTRATE CLEANING SYSTEM AND METHOD

ACTIVE RETICLE CARRIER FOR IN SITU STAGE CORRECTION

Automatic Teaching of Substrate Handling for Production and Process...

In Situ Process Chamber Chuck Cleaning by Cleaning Substrate

System and Method for Monitoring Parameters of a Semiconductor Fact...