Shailendra Srivastava

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Thermal monitor for an extreme ultraviolet light source
- Patent number 9,148,941
- Issue date Sep 29, 2015
- ASML Netherlands B.V.
- Vladimir Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Thermal Monitor For An Extreme Ultraviolet Light Source
- Publication number 20140203195
- Publication date Jul 24, 2014
- Cymer, Inc.
- Vladimir Fleurov
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR