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Shamouil Shamouilian
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
In situ application of etch back for improved deposition into high-...
Patent number
7,399,707
Issue date
Jul 15, 2008
Applied Materials, Inc.
Padmanabhan Krishnaraj
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-core transformer plasma source
Patent number
7,363,876
Issue date
Apr 29, 2008
Applied Materials, Inc.
Canfeng Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In situ application of etch back for improved deposition into high-...
Patent number
6,869,880
Issue date
Mar 22, 2005
Applied Materials, Inc.
Padmanabhan Krishnaraj
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device fabrication chamber cleaning method and appara...
Patent number
6,863,019
Issue date
Mar 8, 2005
Applied Materials, Inc.
Shamouil Shamouilian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Heated catalytic treatment of an effluent gas from a substrate fabr...
Patent number
6,824,748
Issue date
Nov 30, 2004
Applied Materials, Inc.
Tony S. Kaushal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-core transformer plasma source
Patent number
6,755,150
Issue date
Jun 29, 2004
Applied Materials Inc.
Canfeng Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ceramic substrate support
Patent number
6,730,175
Issue date
May 4, 2004
Applied Materials, Inc.
Joseph Yudovsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
RF power delivery for plasma processing using modulated power signal
Patent number
6,726,804
Issue date
Apr 27, 2004
Liang-Guo Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrostatic chuck having composite dielectric layer and method of...
Patent number
6,721,162
Issue date
Apr 13, 2004
Applied Materials Inc.
Edwin C. Weldon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Toroidal plasma source for plasma processing
Patent number
6,712,020
Issue date
Mar 30, 2004
Applied Materials Inc.
Michael S. Cox
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Abatement of hazardous gases in effluent
Patent number
6,689,252
Issue date
Feb 10, 2004
Applied Materials, Inc.
Shamouil Shamouilian
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Process chamber having a corrosion-resistant wall and method
Patent number
6,682,627
Issue date
Jan 27, 2004
Applied Materials, Inc.
Shamouil Shamouilian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treatment of hazardous gases in effluent
Patent number
6,673,323
Issue date
Jan 6, 2004
Applied Materials, Inc.
Ashish Bhatnagar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-layer ceramic electrostatic chuck with integrated channel
Patent number
6,639,783
Issue date
Oct 28, 2003
Applied Materials, Inc.
Shamouil Shamouilian
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Apparatus and method for detecting an end point of chamber cleaning...
Patent number
6,635,144
Issue date
Oct 21, 2003
Applied Materials, Inc.
Zhenjiang Cui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate support tolerant to thermal expansion stresses
Patent number
6,583,980
Issue date
Jun 24, 2003
Applied Materials Inc.
You Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamber cleaning with fluorides of iodine
Patent number
6,581,612
Issue date
Jun 24, 2003
Applied Materials Inc.
Peter Loewenhardt
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fabricating an electrostatic chuck having plasma resistant gas cond...
Patent number
6,581,275
Issue date
Jun 24, 2003
Applied Materials Inc.
Kadthala R. Narendrnath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of fabricating an electrostatic chuck
Patent number
6,557,248
Issue date
May 6, 2003
Applied Materials Inc.
Shamouil Shamouilian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrostatic chuck having heater and method
Patent number
6,538,872
Issue date
Mar 25, 2003
Applied Materials, Inc.
You Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support having bonded sections and method
Patent number
6,503,368
Issue date
Jan 7, 2003
Applied Materials Inc.
Arnold Kholodenko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma chamber support with coupled electrode
Patent number
6,494,958
Issue date
Dec 17, 2002
Applied Materials Inc.
Shamouil Shamouilian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Support for supporting a substrate in a process chamber
Patent number
6,490,144
Issue date
Dec 3, 2002
Applied Materials, Inc.
Kadthala R. Narendrnath
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Electrostatic chuck bonded to base with a bond layer and method
Patent number
6,490,146
Issue date
Dec 3, 2002
Applied Materials Inc.
You Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for measuring pedestal and substrate temperature in a sem...
Patent number
6,481,886
Issue date
Nov 19, 2002
Applied Materials Inc.
Kadthala R. Narendrnath
G01 - MEASURING TESTING
Information
Patent Grant
Plasma chamber support having dual electrodes
Patent number
6,478,924
Issue date
Nov 12, 2002
Applied Materials, Inc.
Shamouil Shamouilian
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Abatement of fluorine gas from effluent
Patent number
6,468,490
Issue date
Oct 22, 2002
Applied Materials, Inc.
Shamouil Shamouilian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Electrostatic chuck having improved electrical connector and method
Patent number
6,462,928
Issue date
Oct 8, 2002
Applied Materials, Inc.
Shamouil Shamouilian
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Semiconductor process chamber having improved gas distributor
Patent number
6,449,871
Issue date
Sep 17, 2002
Applied Materials Inc.
Arnold Kholodenko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process chamber having improved temperature control
Patent number
6,440,221
Issue date
Aug 27, 2002
Applied Materials, Inc.
Shamouil Shamouilian
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Abatement of fluorine gas from effluent
Publication number
20070022958
Publication date
Feb 1, 2007
Shamouil Shamouilian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
In situ application of etch back for improved deposition into high-...
Publication number
20050124166
Publication date
Jun 9, 2005
Applied Materials, Inc.
Padmanabhan Krishnaraj
C30 - CRYSTAL GROWTH
Information
Patent Application
Multi-core transformer plasma source
Publication number
20040226511
Publication date
Nov 18, 2004
Applied Materials, Inc.
Canfeng Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-core transformer plasma source
Publication number
20040226658
Publication date
Nov 18, 2004
Applied Materials, Inc.
Canfeng Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-core transformer plasma source
Publication number
20040226512
Publication date
Nov 18, 2004
Applied Materials, Inc.
Canfeng Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electrostatic chuck having dielectric member with stacked layers an...
Publication number
20040190215
Publication date
Sep 30, 2004
APPLIED MATERIALS, INC.
Edwin C. Weldon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multi-core transformer plasma source
Publication number
20040185610
Publication date
Sep 23, 2004
Applied Materials, Inc.
Canfeng Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multi-core transformer plasma source
Publication number
20040182517
Publication date
Sep 23, 2004
Applied Materials, Inc.
Canfeng Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
In situ application of etch back for improved deposition into high-...
Publication number
20030136332
Publication date
Jul 24, 2003
APPLIED MATERIALS INC., a Delaware corporation
Padmanabhan Krishnaraj
C30 - CRYSTAL GROWTH
Information
Patent Application
Ceramic substrate support
Publication number
20030136520
Publication date
Jul 24, 2003
APPLIED MATERIALS, INC.
Joseph Yudovsky
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multi-core transformer plasma source
Publication number
20030085205
Publication date
May 8, 2003
Applied Materials, Inc.
Canfeng Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process chamber having a corrosion-resistant wall and method
Publication number
20030056897
Publication date
Mar 27, 2003
APPLIED MATERIALS, INC.
Shamouil Shamouilian
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
Semiconductor device fabrication chamber cleaning method and appara...
Publication number
20030036272
Publication date
Feb 20, 2003
APPLIED MATERIALS, INC.
Shamouil Shamouilian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Abatement of fluorine gas from effluent
Publication number
20020192129
Publication date
Dec 19, 2002
APPLIED MATERIALS, INC.
Shamouil Shamouilian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Heated catalytic treatment of an effluent gas from a substrate fabr...
Publication number
20020182131
Publication date
Dec 5, 2002
APPLIED MATERIALS, INC.
Tony S. Kaushal
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Toroidal plasma source for plasma processing
Publication number
20020157793
Publication date
Oct 31, 2002
Applied Materials, Inc.
Michael S. Cox
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and method for detecting an end point of chamber cleaning...
Publication number
20020151186
Publication date
Oct 17, 2002
Zhenjiang Cui
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electrostatic chuck having composite dielectric layer and method of...
Publication number
20020135969
Publication date
Sep 26, 2002
APPLIED MATERIALS, INC.
Edwin C. Weldon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Fabricating an electrostatic chuck having plasma resistant gas cond...
Publication number
20020095782
Publication date
Jul 25, 2002
APPLIED MATERIALS, INC.
Kadthala R. Narendrnath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RF power delivery for plasma processing using modulated power signal
Publication number
20020096257
Publication date
Jul 25, 2002
APPLIED MATERIALS, INC.
Liang-Guo Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electrostatic chuck bonded to base with a bond layer and method
Publication number
20020075624
Publication date
Jun 20, 2002
APPLIED MATERIALS, INC.
You Wang
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
Method and apparatus for supplying electricity uniformly to a workp...
Publication number
20020066664
Publication date
Jun 6, 2002
APPLIED MATERIALS, INC.
Shamouil Shamouilian
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
ELECTROSTATIC CHUCK HAVING COMPOSITE BASE AND METHOD
Publication number
20020036881
Publication date
Mar 28, 2002
SHAMOUIL SHAMOUILIAN
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
PROCESS CHAMBER HAVING IMPROVED TEMPERATURE CONTROL
Publication number
20010042594
Publication date
Nov 22, 2001
SHAMOUIL SHAMOUILIAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT FOR PLASMA PROCESSING
Publication number
20010003298
Publication date
Jun 14, 2001
SHAMOUIL SHAMOUILIAN
H01 - BASIC ELECTRIC ELEMENTS