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Shan-Chan Suc
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Toufen Township, TW
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last 30 patents
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Patent Grant
Method for repairing opaque defects on semiconductor mask reticles
Patent number
7,223,503
Issue date
May 29, 2007
Taiwan Semiconductor Manufacturing Company
Wei-Lian Lin
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Method for repairing opaque defects on semiconductor mask reticles
Publication number
20050146715
Publication date
Jul 7, 2005
Wei-Lian Lin
G01 - MEASURING TESTING