Shan-Hua Wu

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Hsinchu, TW

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Patents Grantslast 30 patents

Information Patent Grant
Thermophoretic particle removing system
- Patent number 6,685,842
- Issue date Feb 3, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ruei-Hung Jang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
Thermophoretic particle removing system
- Publication number 20030121869
- Publication date Jul 3, 2003
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ruei-Hung Jang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL