Shan Tang

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Middleton, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Techniques for improved low dielectric constant film processing
- Patent number 11,756,796
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Rajesh Prasad
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION FOR REDUCED ROUGHNESS OF SILICON NITRIDE
- Publication number 20240332009
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Qixin Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION FOR REDUCED HYDROGEN INCORPORATION IN AMORPHOUS SI...
- Publication number 20230298892
- Publication date Sep 21, 2023
- Applied Materials, Inc.
- Rui Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR IMPROVED LOW DIELECTRIC CONSTANT FILM PROCESSING
- Publication number 20220367205
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Rajesh Prasad
- H01 - BASIC ELECTRIC ELEMENTS