Shan ZHANG

Person

  • Shanghai, CN

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM DEPOSITION DEVICE

    • Publication number 20250188612
    • Publication date Jun 12, 2025
    • ACM RESEARCH (SHANGHAI), INC.
    • Hui Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FURNACE TUBE FOR THIN FILM DEPOSITION, THIN FILM DEPOSITION METHOD...

    • Publication number 20250109495
    • Publication date Apr 3, 2025
    • ACM RESEARCH (SHANGHAI), INC.
    • Hui Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HIGH-TEMPERATURE TUBE FURNACE

    • Publication number 20250029848
    • Publication date Jan 23, 2025
    • ACM RESEARCH (SHANGHAI), INC.
    • Hui Wang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...

    • Publication number 20240368766
    • Publication date Nov 7, 2024
    • ACM RESEARCH (SHANGHAI), INC.
    • Hui Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF

    • Publication number 20200145771
    • Publication date May 7, 2020
    • Semiconductor Manufacturing International (Shanghai) Corporation
    • Yijun CHEN
    • B81 - MICRO-STRUCTURAL TECHNOLOGY
  • Information Patent Application

    SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF

    • Publication number 20180152801
    • Publication date May 31, 2018
    • Semiconductor Manufacturing International (Shanghai) Corporation
    • Yijun CHEN
    • H01 - BASIC ELECTRIC ELEMENTS