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Shane Lawrence KINTNER
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Santa Clara, CA, US
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last 30 patents
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Patent Grant
Methods and apparatus for cooling a substrate support
Patent number
12,232,299
Issue date
Feb 18, 2025
Applied Materials, Inc.
Robert Irwin Decottignies
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHODS AND APPARATUS FOR COOLING A SUBSTRATE SUPPORT
Publication number
20240130082
Publication date
Apr 18, 2024
Robert Irwin DECOTTIGNIES
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR