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Shang Chen

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  • Tokyo, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FORMATION OF SiN THIN FILMS
    • Publication number 20220044923
    • Publication date Feb 10, 2022
    • ASM IP HOLDING B.V.
    • TOSHIYA SUZUKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
    • Publication number 20210082684
    • Publication date Mar 18, 2021
    • ASM IP HOLDING B.V.
    • Antti J. Niskanen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Deposition of SiN
    • Publication number 20200365392
    • Publication date Nov 19, 2020
    • ASM IP HOLDING B.V.
    • Shang Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REACTION CHAMBER PASSIVATION AND SELECTIVE DEPOSITION OF METALLIC F...
    • Publication number 20200291511
    • Publication date Sep 17, 2020
    • ASM IP HOLDING B.V.
    • Delphine Longrie
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FORMATION OF SiN THIN FILMS
    • Publication number 20190378711
    • Publication date Dec 12, 2019
    • ASM IP HOLDING B.V.
    • TOSHIYA SUZUKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
    • Publication number 20190371594
    • Publication date Dec 5, 2019
    • ASM IP HOLDING B.V.
    • Antti J. Niskanen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Deposition of SiN
    • Publication number 20190295838
    • Publication date Sep 26, 2019
    • ASM IP HOLDING B.V.
    • Shang Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REACTION CHAMBER PASSIVATION AND SELECTIVE DEPOSITION OF METALLIC F...
    • Publication number 20190055643
    • Publication date Feb 21, 2019
    • ASM IP HOLDING B.V.
    • Delphine Longrie
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
    • Publication number 20180366314
    • Publication date Dec 20, 2018
    • ASM IP HOLDING B.V.
    • Antti J. Niskanen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    REACTION CHAMBER PASSIVATION AND SELECTIVE DEPOSITION OF METALLIC F...
    • Publication number 20180080121
    • Publication date Mar 22, 2018
    • ASM IP HOLDING B.V.
    • Delphine Longrie
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Deposition of SiN
    • Publication number 20180068844
    • Publication date Mar 8, 2018
    • ASM IP HOLDING B.V.
    • Shang Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Deposition of SiN
    • Publication number 20170372886
    • Publication date Dec 28, 2017
    • ASM IP HOLDING B.V.
    • Shang Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SELECTIVE DEPOSITION OF METALLIC FILMS
    • Publication number 20170358482
    • Publication date Dec 14, 2017
    • ASM IP HOLDING B.V.
    • Shang Chen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
    • Publication number 20170133216
    • Publication date May 11, 2017
    • ASM IP HOLDING B.V.
    • Antti J. Niskanen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    FORMATION OF SiN THIN FILMS
    • Publication number 20170062204
    • Publication date Mar 2, 2017
    • ASM IP HOLDING B.V.
    • TOSHIYA SUZUKI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Deposition of SiN
    • Publication number 20160079054
    • Publication date Mar 17, 2016
    • ASM IP HOLDING B.V.
    • Shang Chen
    • H01 - BASIC ELECTRIC ELEMENTS