Shang Chen

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Helsinki, FI

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Patents Grantslast 30 patents

Information Patent Grant
Si precursors for deposition of SiN at low temperatures
- Patent number 11,289,327
- Issue date Mar 29, 2022
- ASM IP Holding B.V.
- Antti J. Niskanen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Si precursors for deposition of SiN at low temperatures
- Patent number 10,424,477
- Issue date Sep 24, 2019
- ASM IP Holding B.V.
- Antti J. Niskanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Si precursors for deposition of SiN at low temperatures
- Patent number 9,824,881
- Issue date Nov 21, 2017
- ASM IP Holding B.V.
- Antti J. Niskanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Si precursors for deposition of SiN at low temperatures
- Patent number 9,564,309
- Issue date Feb 7, 2017
- ASM IP Holding B.V.
- Antti J. Niskanen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
- Publication number 20200013611
- Publication date Jan 9, 2020
- ASM IP HOLDING B.V.
- Antti J. Niskanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
- Publication number 20180151344
- Publication date May 31, 2018
- ASM IP HOLDING B.V.
- Antti J. Niskanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
- Publication number 20140273528
- Publication date Sep 18, 2014
- ASM IP HOLDING B.V.
- Antti J. Niskanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
- Publication number 20140273531
- Publication date Sep 18, 2014
- ASM IP HOLDING B.V.
- Antti J. Niskanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
- Publication number 20140273477
- Publication date Sep 18, 2014
- ASM IP HOLDING B.V.
- Antti J. Niskanen
- H01 - BASIC ELECTRIC ELEMENTS