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RADIATION COLLECTOR
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Publication number 20240004304
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Publication date Jan 4, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Cheng Hung TSAI
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHY SYSTEM AND METHODS
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Publication number 20230400763
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Publication date Dec 14, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Cheng Hung TSAI
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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EUV LIGHT SOURCE AND APPARATUS FOR LITHOGRAPHY
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Publication number 20230389168
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Publication date Nov 30, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Shang-Chieh CHIEN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHY SYSTEM AND METHODS
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Publication number 20230375940
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Publication date Nov 23, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Shang-Chieh Chien
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H01 - BASIC ELECTRIC ELEMENTS
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METHODS OF CLEANING A LITHOGRAPHY SYSTEM
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Publication number 20230375949
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Publication date Nov 23, 2023
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Taiwan Semiconductor Manufacturing company Ltd.
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Cho-Ying LIN
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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LITHOGRAPHY THERMAL CONTROL
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Publication number 20230284366
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Publication date Sep 7, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Tai-Yu CHEN
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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LITHOGRAPHY CONTAMINATION CONTROL
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Publication number 20230273534
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Publication date Aug 31, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Chieh HSIEH
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H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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RETICLE CLEANING DEVICE AND METHOD OF USE
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Publication number 20230266680
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Publication date Aug 24, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Che-Chang HSU
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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EUV LITHOGRAPHY APPARATUS
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Publication number 20230215594
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Publication date Jul 6, 2023
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TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY , LTD.
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Cheng Hung TSAI
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY