Shang-I Chou

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
System, method and apparatus for RF power compensation in plasma et...
- Patent number 9,412,670
- Issue date Aug 9, 2016
- Lam Research Corporation
- Robert G. O'Neill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ozone plenum as UV shutter or tunable UV filter for cleaning semico...
- Patent number 8,624,210
- Issue date Jan 7, 2014
- Lam Research Corporation
- Yen-Kun Victor Wang
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method and apparatus of halogen removal
- Patent number 8,525,139
- Issue date Sep 3, 2013
- Lam Research Corporation
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ozone plenum as UV shutter or tunable UV filter for cleaning semico...
- Patent number 8,492,736
- Issue date Jul 23, 2013
- Lam Research Corporation
- Yen-Kun Victor Wang
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Grant
Method and apparatus of halogen removal using optimal ozone and UV...
- Patent number 8,232,538
- Issue date Jul 31, 2012
- Lam Research Corporation
- Sanket Sant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for centering wafer on chuck
- Patent number 8,060,330
- Issue date Nov 15, 2011
- Lam Research Corporation
- Robert Griffith O'Neill
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
System, Method and Apparatus for RF Power Compensation in Plasma Et...
- Publication number 20140349417
- Publication date Nov 27, 2014
- LAM RESEARCH CORPORATION
- Robert G. O'Neill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OZONE PLENUM AS UV SHUTTER OR TUNABLE UV FILTER FOR CLEANING SEMICO...
- Publication number 20130288488
- Publication date Oct 31, 2013
- Yen-Kun Victor Wang
- C03 - GLASS MINERAL OR SLAG WOOL
Information Patent Application
OZONE PLENUM AS UV SHUTTER OR TUNABLE UV FILTER FOR CLEANING SEMICO...
- Publication number 20110306213
- Publication date Dec 15, 2011
- LAM RESEARCH CORPORATION
- Yen-Kun Victor Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS OF HALOGEN REMOVAL
- Publication number 20110097902
- Publication date Apr 28, 2011
- LAM RESEARCH CORPORATION
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS OF HALOGEN REMOVAL USING OPTIMAL OZONE AND UV...
- Publication number 20110095207
- Publication date Apr 28, 2011
- LAM RESEARCH CORPORATION
- Sanket Sant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Centering Wafer on Chuck
- Publication number 20100150695
- Publication date Jun 17, 2010
- LAM RESEARCH CORPORATION
- Robert Griffith O'Neill
- G01 - MEASURING TESTING