Shang-Ting HSIEH

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Taichung City, TW

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Patents Grantslast 30 patents

Information Patent Grant
Methods for etching a hardmask layer for an interconnection structu...
- Patent number 9,653,320
- Issue date May 16, 2017
- Applied Materials, Inc.
- Sumit Agarwal
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR ETCHING A HARDMASK LAYER FOR AN INTERCONNECTION STRUCTU...
- Publication number 20160079077
- Publication date Mar 17, 2016
- Applied Materials, Inc.
- Sumit AGARWAL
- H01 - BASIC ELECTRIC ELEMENTS