Shankar Swaminathan

Person

Beaverton, OR, US

People

Patents Grantslast 30 patents

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- Patent number 11,959,175
- Issue date Apr 16, 2024
- Lam Research Corporation
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Planar substrate edge contact with open volume equalization pathway...
- Patent number 11,443,975
- Issue date Sep 13, 2022
- Lam Research Corporation
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 11,133,180
- Issue date Sep 28, 2021
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 11,127,567
- Issue date Sep 21, 2021
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for UV-based suppression of plasma instability
- Patent number 11,120,989
- Issue date Sep 14, 2021
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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- Patent number 11,072,860
- Issue date Jul 27, 2021
- Lam Research Corporation
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...
- Patent number 11,011,379
- Issue date May 18, 2021
- Lam Research Corporation
- Reza Arghavani
- H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing chamber including conical surface for reducing...
- Patent number 10,840,061
- Issue date Nov 17, 2020
- Lam Research Corporation
- Richard Phillips
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing films on sensitive substrates
- Patent number 10,741,458
- Issue date Aug 11, 2020
- Novellus Systems, Inc.
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low volume showerhead with porous baffle
- Patent number 10,741,365
- Issue date Aug 11, 2020
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for suppressing parasitic plasma and reducing w...
- Patent number 10,665,429
- Issue date May 26, 2020
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reducing backside deposition at wafer edge
- Patent number 10,648,079
- Issue date May 12, 2020
- Lam Research Corporation
- Chloe Baldasseroni
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Doped ALD films for semiconductor patterning applications
- Patent number 10,629,435
- Issue date Apr 21, 2020
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Planar substrate edge contact with open volume equalization pathway...
- Patent number 10,622,243
- Issue date Apr 14, 2020
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...
- Patent number 10,559,468
- Issue date Feb 11, 2020
- Lam Research Corporation
- Reza Arghavani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for tilting a wafer for achieving deposition un...
- Patent number 10,541,117
- Issue date Jan 21, 2020
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware and process for film uniformity improvement
- Patent number 10,526,700
- Issue date Jan 7, 2020
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for UV-based suppression of plasma instability
- Patent number 10,529,557
- Issue date Jan 7, 2020
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite dielectric interface layers for interconnect structures
- Patent number 10,418,236
- Issue date Sep 17, 2019
- Lam Research Corporation
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for showerhead backside parasitic plasma su...
- Patent number 10,407,773
- Issue date Sep 10, 2019
- Lam Research Corporation
- Adrien LaVoie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Collar, conical showerheads and/or top plates for reducing recircul...
- Patent number 10,403,474
- Issue date Sep 3, 2019
- Lam Research Corporation
- Richard Phillips
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low volume showerhead with faceplate holes for improved flow unifor...
- Patent number 10,378,107
- Issue date Aug 13, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 10,361,076
- Issue date Jul 23, 2019
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods enabling low defect processing via controlled s...
- Patent number 10,323,323
- Issue date Jun 18, 2019
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Asymmetric pedestal/carrier ring arrangement for edge impedance mod...
- Patent number 10,301,718
- Issue date May 28, 2019
- Lam Research Corporation
- Ryan Blaquiere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Soft landing nanolaminates for advanced patterning
- Patent number 10,192,742
- Issue date Jan 29, 2019
- Novellus Systems, Inc.
- Frank L. Pasquale
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Purge and pumping structures arranged beneath substrate plane to re...
- Patent number 10,157,755
- Issue date Dec 18, 2018
- Lam Research Corporation
- Ramesh Chandrasekharan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for high modulus ALD SiO2 spacer
- Patent number 10,134,579
- Issue date Nov 20, 2018
- Lam Research Corporation
- Chloe Baldasseroni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for UV-based suppression of plasma instability
- Patent number 10,109,478
- Issue date Oct 23, 2018
- Lam Research Corporation
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hardware and process for film uniformity improvement
- Patent number 10,100,407
- Issue date Oct 16, 2018
- Lam Research Corporation
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILL ON DEMAND AMPOULE REFILL
- Publication number 20240218515
- Publication date Jul 4, 2024
- LAM RESEARCH CORPORATION
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...
- Publication number 20220059348
- Publication date Feb 24, 2022
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILL ON DEMAND AMPOULE REFILL
- Publication number 20210324521
- Publication date Oct 21, 2021
- LAM RESEARCH CORPORATION
- Tuan Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20200335304
- Publication date Oct 22, 2020
- LAM RESEARCH CORPORATION
- Hu Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20200227304
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Patrick Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...
- Publication number 20200219757
- Publication date Jul 9, 2020
- LAM RESEARCH CORPORATION
- Patrick BREILING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for UV-Based Suppression of Plasma Instability
- Publication number 20200111666
- Publication date Apr 9, 2020
- LAM RESEARCH CORPORATION
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TR...
- Publication number 20190385850
- Publication date Dec 19, 2019
- LAM RESEARCH CORPORATION
- Reza Arghavani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING CHAMBER INCLUDING CONICAL SURFACE FOR REDUCING...
- Publication number 20190385817
- Publication date Dec 19, 2019
- LAM RESEARCH CORPORATION
- Richard Phillips
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...
- Publication number 20190311897
- Publication date Oct 10, 2019
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PURGE AND PUMPING STRUCTURES ARRANGED BENEATH SUBSTRATE PLANE TO RE...
- Publication number 20190122871
- Publication date Apr 25, 2019
- LAM RESEARCH CORPORATION
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for UV-Based Suppression of Plasma Instability
- Publication number 20190057864
- Publication date Feb 21, 2019
- LAM RESEARCH CORPORATION
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HARDWARE AND PROCESS FOR FILM UNIFORMITY IMPROVEMENT
- Publication number 20190040528
- Publication date Feb 7, 2019
- LAM RESEARCH CORPORATION
- Purushottam Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE DIELECTRIC INTERFACE LAYERS FOR INTERCONNECT STRUCTURES
- Publication number 20180342389
- Publication date Nov 29, 2018
- LAM RESEARCH CORPORATION
- Kapu Sirish Reddy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TR...
- Publication number 20180269061
- Publication date Sep 20, 2018
- LAM RESEARCH CORPORATION
- Reza Arghavani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING FILMS ON SENSITIVE SUBSTRATES
- Publication number 20180247875
- Publication date Aug 30, 2018
- Novellus Systems, Inc.
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOFT LANDING NANOLAMINATES FOR ADVANCED PATTERNING
- Publication number 20180158683
- Publication date Jun 7, 2018
- Novellus Systems, Inc.
- Frank L. Pasquale
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR HIGH MODULUS ALD SIO2 SPACER
- Publication number 20180138036
- Publication date May 17, 2018
- LAM RESEARCH CORPORATION
- Chloe Baldasseroni
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...
- Publication number 20180122685
- Publication date May 3, 2018
- LAM RESEARCH CORPORATION
- Patrick Breiling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE DIELECTRIC INTERFACE LAYERS FOR INTERCONNECT STRUCTURES
- Publication number 20180096886
- Publication date Apr 5, 2018
- LAM RESEARCH CORPORATION
- Kapu Sirish Reddy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPORALLY PULSED AND KINETICALLY MODULATED CVD DIELECTRICS FOR GAP...
- Publication number 20180082886
- Publication date Mar 22, 2018
- LAM RESEARCH CORPORATION
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for UV-Based Suppression of Plasma Instability
- Publication number 20180076028
- Publication date Mar 15, 2018
- LAM RESEARCH CORPORATION
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...
- Publication number 20180068833
- Publication date Mar 8, 2018
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH DRY ETCH RATE MATERIALS FOR SEMICONDUCTOR PATTERNING APPLICATIONS
- Publication number 20180061650
- Publication date Mar 1, 2018
- LAM RESEARCH CORPORATION
- Arpan Mahorowala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOPED ALD FILMS FOR SEMICONDUCTOR PATTERNING APPLICATIONS
- Publication number 20180033622
- Publication date Feb 1, 2018
- LAM RESEARCH CORPORATION
- Shankar Swaminathan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLLAR, CONICAL SHOWERHEADS AND/OR TOP PLATES FOR REDUCING RECIRCUL...
- Publication number 20180012733
- Publication date Jan 11, 2018
- LAM RESEARCH CORPORATION
- Richard Phillips
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...
- Publication number 20170323786
- Publication date Nov 9, 2017
- LAM RESEARCH CORPORATION
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING FILMS ON SENSITIVE SUBSTRATES
- Publication number 20170316988
- Publication date Nov 2, 2017
- Novellus Systems, Inc.
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ASYMMETRIC PEDESTAL/CARRIER RING ARRANGEMENT FOR EDGE IMPEDANCE MOD...
- Publication number 20170275756
- Publication date Sep 28, 2017
- LAM RESEARCH CORPORATION
- Ryan Blaquiere
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ASSISTED ATOMIC LAYER DEPOSITION METAL OXIDE FOR PATTERNING...
- Publication number 20170263450
- Publication date Sep 14, 2017
- LAM RESEARCH CORPORATION
- Shankar Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shankar Swaminathan

Person

Patents Grantslast 30 patents

Fill on demand ampoule refill

Planar substrate edge contact with open volume equalization pathway...

Gapfill of variable aspect ratio features with a composite PEALD an...

Systems and methods for suppressing parasitic plasma and reducing w...

Systems and methods for UV-based suppression of plasma instability

Fill on demand ampoule refill

Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...

Substrate processing chamber including conical surface for reducing...

Methods for depositing films on sensitive substrates

Low volume showerhead with porous baffle

Systems and methods for suppressing parasitic plasma and reducing w...

Reducing backside deposition at wafer edge

Doped ALD films for semiconductor patterning applications

Planar substrate edge contact with open volume equalization pathway...

Capped ALD films for doping fin-shaped channel regions of 3-D IC tr...

Systems and methods for tilting a wafer for achieving deposition un...

Hardware and process for film uniformity improvement

Systems and methods for UV-based suppression of plasma instability

Composite dielectric interface layers for interconnect structures

Methods and apparatuses for showerhead backside parasitic plasma su...

Collar, conical showerheads and/or top plates for reducing recircul...

Low volume showerhead with faceplate holes for improved flow unifor...

Gapfill of variable aspect ratio features with a composite PEALD an...

Systems and methods enabling low defect processing via controlled s...

Asymmetric pedestal/carrier ring arrangement for edge impedance mod...

Soft landing nanolaminates for advanced patterning

Purge and pumping structures arranged beneath substrate plane to re...

Method for high modulus ALD SiO2 spacer

Systems and methods for UV-based suppression of plasma instability

Hardware and process for film uniformity improvement

Patents Applicationslast 30 patents

FILL ON DEMAND AMPOULE REFILL

GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...

FILL ON DEMAND AMPOULE REFILL

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL A...

Systems and Methods for UV-Based Suppression of Plasma Instability

CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TR...

SUBSTRATE PROCESSING CHAMBER INCLUDING CONICAL SURFACE FOR REDUCING...

GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...

PURGE AND PUMPING STRUCTURES ARRANGED BENEATH SUBSTRATE PLANE TO RE...

Systems and Methods for UV-Based Suppression of Plasma Instability

HARDWARE AND PROCESS FOR FILM UNIFORMITY IMPROVEMENT

COMPOSITE DIELECTRIC INTERFACE LAYERS FOR INTERCONNECT STRUCTURES

CAPPED ALD FILMS FOR DOPING FIN-SHAPED CHANNEL REGIONS OF 3-D IC TR...

METHODS FOR DEPOSITING FILMS ON SENSITIVE SUBSTRATES

SOFT LANDING NANOLAMINATES FOR ADVANCED PATTERNING

METHOD FOR HIGH MODULUS ALD SIO2 SPACER

PLANAR SUBSTRATE EDGE CONTACT WITH OPEN VOLUME EQUALIZATION PATHWAY...

COMPOSITE DIELECTRIC INTERFACE LAYERS FOR INTERCONNECT STRUCTURES

TEMPORALLY PULSED AND KINETICALLY MODULATED CVD DIELECTRICS FOR GAP...

Systems and Methods for UV-Based Suppression of Plasma Instability

SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING W...

HIGH DRY ETCH RATE MATERIALS FOR SEMICONDUCTOR PATTERNING APPLICATIONS

DOPED ALD FILMS FOR SEMICONDUCTOR PATTERNING APPLICATIONS

COLLAR, CONICAL SHOWERHEADS AND/OR TOP PLATES FOR REDUCING RECIRCUL...

GAPFILL OF VARIABLE ASPECT RATIO FEATURES WITH A COMPOSITE PEALD AN...

METHODS FOR DEPOSITING FILMS ON SENSITIVE SUBSTRATES

ASYMMETRIC PEDESTAL/CARRIER RING ARRANGEMENT FOR EDGE IMPEDANCE MOD...

PLASMA ASSISTED ATOMIC LAYER DEPOSITION METAL OXIDE FOR PATTERNING...