Shankar Swaminathan

Person

Phoenix, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Vapor deposition of films comprising molybdenum
- Patent number 12,354,877
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structure including SiOCN layer and method of forming same
- Patent number 12,293,911
- Issue date May 6, 2025
- ASM IP Holding B.V.
- YoungChol Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum nitride film on a surface of a...
- Patent number 12,215,416
- Issue date Feb 4, 2025
- ASM IP Holding B.V.
- Eric Christopher Stevens
- G11 - INFORMATION STORAGE
Information Patent Grant
Apparatus and methods for performing an in-situ etch of reaction ch...
- Patent number 12,203,166
- Issue date Jan 21, 2025
- ASM IP Holding B.V.
- Amit Mishra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Channeled lift pin
- Patent number 12,033,885
- Issue date Jul 9, 2024
- ASM IP Holding B.V.
- Govindarajasekhar Singu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing device
- Patent number 11,946,136
- Issue date Apr 2, 2024
- ASM IP Holding B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
- Patent number 11,908,736
- Issue date Feb 20, 2024
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selective deposition of silicon nitride layer and struct...
- Patent number 11,901,175
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a polycrystalline molybdenum film over a surfac...
- Patent number 11,898,242
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum nitride film on a surface of a...
- Patent number 11,827,978
- Issue date Nov 28, 2023
- ASM IP Holding B.V.
- Eric Christopher Stevens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structure including SiOCN layer and method of forming same
- Patent number 11,742,198
- Issue date Aug 29, 2023
- ASM IP Holding B.V.
- YoungChol Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
- Patent number 11,581,220
- Issue date Feb 14, 2023
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selective deposition of silicon nitride layer and struct...
- Patent number 11,424,119
- Issue date Aug 23, 2022
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing a molybdenum metal film over a dielectric su...
- Patent number 11,295,980
- Issue date Apr 5, 2022
- ASM IP Holding B.V.
- Bhushan Zope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for depositing a molybdenum nitride film on a surface of a...
- Patent number 11,286,558
- Issue date Mar 29, 2022
- ASM IP Holding B.V.
- Eric Christopher Stevens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure including SiOC layer and method of forming same
- Patent number 11,114,294
- Issue date Sep 7, 2021
- ASM IP Holding B.V.
- Bed Prasad Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
- Publication number 20250239444
- Publication date Jul 24, 2025
- ASM IP HOLDING B.V.
- YoungChol Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR PERFORMING AN IN-SITU ETCH OF REACTION CH...
- Publication number 20250101581
- Publication date Mar 27, 2025
- ASM IP HOLDING B.V.
- Amit Mishra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...
- Publication number 20250092513
- Publication date Mar 20, 2025
- ASM IP HOLDING B.V.
- Eric Christopher Stevens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM ON A DIELECTRIC SURF...
- Publication number 20250029834
- Publication date Jan 23, 2025
- ASM IP HOLDING B.V.
- Bhushan Zope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE
- Publication number 20240200189
- Publication date Jun 20, 2024
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...
- Publication number 20240153817
- Publication date May 9, 2024
- ASM IP HOLDING B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...
- Publication number 20240068092
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Eric Christopher Stevens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
- Publication number 20230369040
- Publication date Nov 16, 2023
- ASM IP HOLDING B.V.
- YoungChol Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE LAYER AND STRUCT...
- Publication number 20220351958
- Publication date Nov 3, 2022
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...
- Publication number 20220216105
- Publication date Jul 7, 2022
- ASM IP HOLDING B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...
- Publication number 20220186364
- Publication date Jun 16, 2022
- ASM IP HOLDING B.V.
- Eric Christopher Stevens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF TUNGSTEN FILMS
- Publication number 20210404060
- Publication date Dec 30, 2021
- ASM IP HOLDING B.V.
- Robert Brennan Milligan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION OF FILMS COMPRISING MOLYBDENUM
- Publication number 20210407809
- Publication date Dec 30, 2021
- ASM IP HOLDING B.V.
- Bhushan Zope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR PERFORMING AN IN-SITU ETCH OF REACTION CH...
- Publication number 20210348271
- Publication date Nov 11, 2021
- ASM IP HOLDING B.V.
- Amit Mishra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHANNELED LIFT PIN
- Publication number 20210210373
- Publication date Jul 8, 2021
- ASM IP HOLDING B.V.
- Govindarajasekhar Singu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...
- Publication number 20210151352
- Publication date May 20, 2021
- ASM IP HOLDING B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING DEVICE
- Publication number 20210087679
- Publication date Mar 25, 2021
- ASM IP HOLDING B.V.
- Jereld Lee Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...
- Publication number 20210057223
- Publication date Feb 25, 2021
- ASM IP HOLDING B.V.
- Eric Christopher Stevens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING A POLYCRYSTALLINE MOLYBDENUM FILM OVER A SURFAC...
- Publication number 20210054500
- Publication date Feb 25, 2021
- ASM IP HOLDING B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME
- Publication number 20200283893
- Publication date Sep 10, 2020
- ASM IP HOLDING B.V.
- YoungChol Byun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRUCTURE INCLUDING SiOC LAYER AND METHOD OF FORMING SAME
- Publication number 20200286725
- Publication date Sep 10, 2020
- ASM IP HOLDING B.V.
- Bed Prasad Sharma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE LAYER AND STRUCT...
- Publication number 20200286726
- Publication date Sep 10, 2020
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FILLING A GAP FEATURE ON A SUBSTRATE SURFACE AND RELATE...
- Publication number 20190067014
- Publication date Feb 28, 2019
- ASM IP HOLDING B.V.
- Kiran Shrestha
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM ON A DIELECTRIC SURF...
- Publication number 20190067003
- Publication date Feb 28, 2019
- ASM IP HOLDING B.V.
- Bhushan Zope
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...
- Publication number 20190067094
- Publication date Feb 28, 2019
- ASM IP HOLDING B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Shankar Swaminathan

Person

Patents Grantslast 30 patents

Vapor deposition of films comprising molybdenum

Structure including SiOCN layer and method of forming same

Methods for depositing a molybdenum nitride film on a surface of a...

Apparatus and methods for performing an in-situ etch of reaction ch...

Channeled lift pin

Semiconductor processing device

Methods for depositing a molybdenum metal film over a dielectric su...

Method for selective deposition of silicon nitride layer and struct...

Methods for forming a polycrystalline molybdenum film over a surfac...

Methods for depositing a molybdenum nitride film on a surface of a...

Structure including SiOCN layer and method of forming same

Methods for depositing a molybdenum metal film over a dielectric su...

Method for selective deposition of silicon nitride layer and struct...

Methods for depositing a molybdenum metal film over a dielectric su...

Methods for depositing a molybdenum nitride film on a surface of a...

Structure including SiOC layer and method of forming same

Patents Applicationslast 30 patents

STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME

APPARATUS AND METHODS FOR PERFORMING AN IN-SITU ETCH OF REACTION CH...

METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM ON A DIELECTRIC SURF...

SEMICONDUCTOR PROCESSING DEVICE

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...

METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...

STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME

METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE LAYER AND STRUCT...

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...

METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...

VAPOR DEPOSITION OF TUNGSTEN FILMS

VAPOR DEPOSITION OF FILMS COMPRISING MOLYBDENUM

APPARATUS AND METHODS FOR PERFORMING AN IN-SITU ETCH OF REACTION CH...

CHANNELED LIFT PIN

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...

SEMICONDUCTOR PROCESSING DEVICE

METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...

METHODS FOR FORMING A POLYCRYSTALLINE MOLYBDENUM FILM OVER A SURFAC...

STRUCTURE INCLUDING SiOCN LAYER AND METHOD OF FORMING SAME

STRUCTURE INCLUDING SiOC LAYER AND METHOD OF FORMING SAME

METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE LAYER AND STRUCT...

METHODS FOR FILLING A GAP FEATURE ON A SUBSTRATE SURFACE AND RELATE...

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM ON A DIELECTRIC SURF...

METHODS FOR DEPOSITING A MOLYBDENUM METAL FILM OVER A DIELECTRIC SU...