Membership
Tour
Register
Log in
Shankarrram A. Athreya
Follow
Person
Sunnyvale, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Integration of CVD tantalum oxide with titanium nitride and tantalu...
Patent number
6,573,150
Issue date
Jun 3, 2003
Applied Materials, Inc.
Randall S. Urdahl
H01 - BASIC ELECTRIC ELEMENTS