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Shannon B. Hill
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Hayward, CA, US
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Patents Grants
last 30 patents
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Patent Grant
System and method for optical-path coupling of light for in-situ ph...
Patent number
11,543,757
Issue date
Jan 3, 2023
KLA Corporation
Shannon Hill
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Boron-based capping layers for EUV optics
Patent number
11,268,911
Issue date
Mar 8, 2022
KLA-Tencor Corporation
Gildardo R Delgado
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
METHOD AND SYSTEM FOR CLEANING OPTICAL ELEMENTS IN EUV OPTICAL SYSTEMS
Publication number
20230418167
Publication date
Dec 28, 2023
Yun Xie
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SYSTEM AND METHOD FOR OPTICAL-PATH COUPLING OF LIGHT FOR IN-SITU PH...
Publication number
20220334504
Publication date
Oct 20, 2022
Shannon Hill
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Dual Vacuum Seal
Publication number
20220260156
Publication date
Aug 18, 2022
KLA Corporation
Francis Chilese
B08 - CLEANING
Information
Patent Application
Boron-Based Capping Layers for EUV Optics
Publication number
20200217804
Publication date
Jul 9, 2020
KLA-Tencor Corporation
Gildardo R. Delgado
H01 - BASIC ELECTRIC ELEMENTS